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Resonator structures and method of making

  • US 9,027,236 B2
  • Filed: 05/31/2011
  • Issued: 05/12/2015
  • Est. Priority Date: 05/31/2011
  • Status: Active Grant
First Claim
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1. A method of forming a resonator, comprising:

  • disposing a metallic layer;

    providing a buffer layer over the metallic layer;

    depositing a dielectric ceramic layer over the buffer layer;

    forming a Swiss-roll structure of the metallic layer and the ceramic layer; and

    heat treating the Swiss-roll structure in a vacuum, inert atmosphere, or reducing atmosphere to form a monolithic Swiss-roll structure, wherein an air gap between turns of the Swiss-roll structure is less than about 1 μ

    m.

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