Alignment measurement system

• US 9,030,661 B1
• Filed: 01/22/2014
• Issued: 05/12/2015
• Est. Priority Date: 03/15/2013
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation
• Original Assignee: KLA-Tencor Corporation
• Inventors: Mieher, Walter D., Gluszczak, Michael R., DiRegolo, Joseph A.
• Primary Examiner(s): Stock, Jr., Gordon J
• Application Number:
  US14/161,549
• Time in Patent Office: 475 Days
• Field of Search: None
• US Class Current: 356/400
• CPC Class Codes: G01B 11/272 using photoelectric detection means
• CPC Class Codes: G03F 9/7003 Alignment type or strategy, e.g. leveling, global alignment
• CPC Class Codes: G03F 9/7046 Strategy, e.g. mark, sensor or wavelength selection
• CPC Class Codes: G03F 9/7069 Alignment mark illumination, e.g. darkfield, dual focus
• CPC Class Codes: G03F 9/7088 Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Abstract

One embodiment relates to an apparatus for alignment measurement. A laser source generates an incident laser beam which is directed to a two-dimensional target grating on a target substrate such that multiple diffracted beams are created. A beam splitter transmits a first plurality of the multiple diffracted beams onto a first optical path and directs a second plurality of the multiple diffracted beams onto a second optical path. Each of the two optical paths includes a reference grating and a detector. Another embodiment relates to a method of measuring alignment of a target substrate. Other embodiments, aspects and features are also disclosed.

Claims

1. An apparatus comprising:

a laser source for generating an incident laser beam which is directed to a two-dimensional target grating on a target substrate such that multiple diffracted beams are created;

a beam splitter for transmitting a first plurality of the multiple diffracted beams onto a first optical path and directing a second plurality of the multiple diffracted beams onto a second optical path;

a first reference grating in the first optical path;

a first detector beyond the first reference grating in the first optical path;

a second reference grating in the second optical path; and

a second detector beyond the second reference grating in the second optical path.

2. The apparatus of claim 1 further comprising:

a collection lens for receiving and collimating the multiple diffracted beams from the two-dimensional target grating.

3. The apparatus of claim 1 further comprising:

a first selection aperture in the first optical path for selecting the first plurality of the multiple diffracted beams; and

a second selection aperture in the second optical path for selecting the second plurality of the multiple diffracted beams.

4. The apparatus of claim 1 further comprising:

a first focusing lens in the first optical path for focusing the first plurality of the multiple diffracted beams onto the first reference grating; and

a second focusing lens in the second optical path for focusing the second plurality of the multiple diffracted beams onto the second reference grating.

5. The apparatus of claim 1 further comprising:

a first detector aperture between the first reference grating and the first detector; and

a second detector aperture between the second reference grating and the second detector.

6. The apparatus of claim 5 further comprising:

a first collimating lens between the first detector aperture and the first detector; and

a second collimating lens between the second detector aperture and the second detector.

7. The apparatus of claim 1 further comprising:

a folding mirror which deflects the second plurality of the multiple diffracted beams onto a portion of the second optical path which is parallel to the first optical path.

8. The apparatus of claim 1 further comprising:

source collimating lenses for collimating the incident laser beam from the laser source;

a steering lens for receiving the incident laser beam from the source collimating lenses; and

mirrors for deflecting the incident laser beam onto the two-dimensional target grating.

9. The apparatus of claim 1, wherein the beam splitter comprises a partially-mirrored plate beam splitter.

10. The apparatus of claim 9, wherein the partially-mirrored plate beam splitter comprises a transmitting region which transmits the first plurality of the multiple diffracted beams and reflecting regions adjacent to the transmitting region which reflects the second plurality of the multiple diffracted beams.

11. The apparatus of claim 9, wherein the partially-mirrored plate beam splitter comprises a reflecting region which reflects the second plurality of the multiple diffracted beams and transmitting regions adjacent to the reflecting region which transmits the first plurality of the multiple diffracted beams.

12. A method of measuring alignment of a target substrate, the method comprising:

generating an incident laser beam which is directed to a two-dimensional target grating on the target substrate such that multiple diffracted beams are created;

transmitting a first plurality of the multiple diffracted beams onto a first optical path;

deflecting a second plurality of the multiple diffracted beams onto a second optical path;

focusing the first plurality of the multiple diffracted beams onto a first reference grating which generates a first diffraction; and

focusing the second plurality of the multiple diffracted beams onto a second reference grating which generates a second diffraction.

13. The method of claim 12 further comprising:

detecting an intensity of the first diffraction at a first detector to measure alignment in a first dimension; and

detecting an intensity of the second diffraction at a second detector to measure alignment in a second dimension.

14. The method of claim 13, wherein the first diffraction is a central diffraction due to the first reference grating, and wherein the second diffraction is a central diffraction due to the second reference grating.

15. The method of claim 12 further comprising:

selecting the first plurality of the multiple diffracted beams using a first selection aperture in the first optical path; and

selecting the second plurality of the multiple diffracted beams using a second selection aperture in the second optical path.

16. The method of claim 12 further comprising:

deflecting the second plurality of the multiple diffracted beams onto a portion of the second optical path which is parallel to the first optical path.

17. The method of claim 12, further comprising:

using a beam splitter to transmit the first plurality of the multiple diffracted beams and deflect the second plurality of the multiple diffracted beams.

18. The method of claim 17, wherein the beam splitter comprises a partially-mirrored plate beam splitter.

19. An alignment measurement system comprising:

a two-dimensional target grating on a target substrate, wherein the target grating has features spaced apart periodically along two dimensions;

a laser source for generating an incident laser beam which is directed to the two-dimensional target grating such that multiple diffracted beams are created;

a beam splitter for transmitting a first plurality of the multiple diffracted beams onto a first optical path and directing a second plurality of the multiple diffracted beams onto a second optical path;

a first reference grating in the first optical path;

a first detector beyond the first reference grating in the first optical path;

a second reference grating in the second optical path; and

a second detector beyond the second reference grating in the second optical path.

20. The alignment measurement system of claim 19 further comprising:

a first selection aperture in the first optical path for selecting the first plurality of the multiple diffracted beams; and

a second selection aperture in the second optical path for selecting the second plurality of the multiple diffracted beams.