Thin active layer fishbone photodiode with a shallow N+ layer and method of manufacturing the same

• US 9,035,412 B2
• Filed: 05/19/2014
• Issued: 05/19/2015
• Est. Priority Date: 05/07/2007
• Status: Active Grant

• Current Assignee: OSI Optoelectronics, Inc. (OSI Systems Incorporated)
• Original Assignee: OSI Optoelectronics, Inc. (OSI Systems Incorporated)
• Inventors: Bui, Peter Steven, Taneja, Narayan Dass
• Primary Examiner(s): Vu, David
• Assistant Examiner(s): Han, Jonathan
• Application Number:
  US14/280,808
• Publication Number:
  US 20150014804A1
• Time in Patent Office: 365 Days
• Field of Search: 257290-292, 257/414, 257431-496, 257E21008-E21021, 257/E21.364, 438/171, 438/190, 438/210, 438238-253, 438/329, 438/379, 438/387, 438/444, 438/901
• US Class Current: 257/448
• CPC Class Codes: H01L 27/1446 in a repetitive configuration
• CPC Class Codes: H01L 27/14603 Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
• CPC Class Codes: H01L 27/1462 Coatings
• CPC Class Codes: H01L 27/14636 Interconnect structures
• CPC Class Codes: H01L 27/14643 Photodiode arrays; MOS imagers
• CPC Class Codes: H01L 27/14658 X-ray, gamma-ray or corpuscular radiation imagers measuring X-, gamma- or corpuscular radiation G01T1/00
• CPC Class Codes: H01L 31/03529 Shape of the potential jump barrier or surface barrier
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

The present invention is directed toward a detector structure, detector arrays, and a method of detecting incident radiation. The present invention comprises a photodiode array and method of manufacturing a photodiode array that provides for reduced radiation damage susceptibility, decreased affects of crosstalk, reduced dark current (current leakage) and increased flexibility in application.

Claims

1. A photodiode array comprising:

a thin active area substrate having at least a front side and a back side;

at least two diode elements integrally formed in the substrate forming said array, wherein each diode element has a plurality of contiguously interconnected p+ bones, a p+ bone frame periphery and at least one shallow n+ region between adjacent p+ bones, wherein each p+ bone is protected by a thick oxide layer, and wherein a last one of the plurality of bones is part of the p+bone frame periphery; and

,

a common cathode metallization on the back side and a plurality of front side anode contacts, wherein at least one of said anode contacts is connected to only the last one of the bones and wherein said anode contacts comprise at least one metal bar positioned on top of said last one of the bones and connected to a wire bonding pad.

2. The photodiode array of claim 1, further comprising an antireflective coating layer.

3. The photodiode array of claim 2, wherein said antireflective coating comprises a thin film material, said thin film material being one of an oxide, a sulfide, a fluoride, a nitride, a selenide, or a metal.

4. A photodiode array comprising:

a thin active area substrate having at least a front side and a back side;

at least two diode elements integrally formed in the substrate forming said array, wherein each diode element has a plurality of contiguously interconnected p+ bones, a p+ bone frame periphery and at least one shallow n+ region between adjacent p+ bones, wherein each p+bone is protected by a thick oxide layer, and wherein a last one of the plurality of bones is part of the p+ bone frame periphery; and

,

a common cathode metallization on the back side and a plurality of front side anode contacts, wherein said anode contacts comprise metal bars placed on each of said interconnected p+ bones as well as the p+ bone periphery and connected to a wire bonding pad.

5. The photodiode array of claim 4, further comprising an antireflective coating layer.

6. The photodiode array of claim 5, wherein said antireflective coating comprises a thin film material, said thin film material being one of an oxide, a sulfide, a fluoride, a nitride, a selenide, or a metal.

7. A photodiode array comprising:

a thin active layer substrate having at least a front side and a back side, wherein said thin active layer has a thickness of 15 μ

m;

a mechanical support bonded to said back side of said thin active layer substrate;

a plurality of photodiodes integrally formed in the thin active layer substrate forming said array, wherein each of said photodiodes has a p+ fishbone pattern on said front side, further comprising a plurality of widely spaced p+bones, a p+ bone frame periphery and at least one n+ region between adjacent p+ bones, wherein said n+region has a depth of 0.3μ

m, and wherein each p+ bone creates a p-n junction;

an oxide layer of a first thickness formed on each of said p-n junction;

an anti-reflective layer of a second thickness formed on said oxide layer, wherein said second thickness is thinner than said first thickness; and

a plurality of anode contacts provided on said front side and a common cathode metallization on said back side.

8. The photodiode array of claim 7, wherein said first thickness of said oxide layer comprises about 8000 Å

of silicon oxide.

9. The photodiode array of claim 8, wherein said first thickness of said oxide layer further comprises about 425 Å

of silicon nitride.

10. The photodiode array of claim 7, wherein said second thickness of said anti-reflective layer comprises about 150 Å

of silicon oxide.

11. The photodiode array of claim 7, wherein said second thickness of said anti-reflective layer comprises about 425 Å

of silicon nitride.