MEMS device with independent rotation in two axes of rotation
First Claim
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1. A MEMS device comprising:
- a frame that supports a rotatable element so as to allow the rotatable element to rotate about a first axis of rotation;
a first pair of interconnections that connect the frame to a pair of supports so as to allow the frame to rotate about a second axis of rotation;
a first actuator for actuating rotation of the rotatable element in the first axis of rotation; and
,a second actuator for actuating rotation of the frame in the second axis of rotation;
the first actuator formed so as to rotate with the frame about the second axis of rotation;
the frame having insulating regions and at least two conductive regions that are electrically isolated from each other by the insulating regions thereby defining at least two conductive channels.
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Abstract
A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.
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Citations
26 Claims
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1. A MEMS device comprising:
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a frame that supports a rotatable element so as to allow the rotatable element to rotate about a first axis of rotation; a first pair of interconnections that connect the frame to a pair of supports so as to allow the frame to rotate about a second axis of rotation; a first actuator for actuating rotation of the rotatable element in the first axis of rotation; and
,a second actuator for actuating rotation of the frame in the second axis of rotation; the first actuator formed so as to rotate with the frame about the second axis of rotation; the frame having insulating regions and at least two conductive regions that are electrically isolated from each other by the insulating regions thereby defining at least two conductive channels. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A MEMS device comprising:
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a frame that supports a rotatable element so as to allow the rotatable element to rotate about a first axis of rotation; a first pair of interconnections that connect the frame to a pair of supports so as to allow the frame to rotate about a second axis of rotation; a first actuator for actuating rotation of the rotatable element in the first axis of rotation; and
,a second actuator for actuating rotation of the frame in the second axis of rotation; wherein the first actuator is formed so as to rotate with the frame about the second axis of rotation; wherein the first actuator is a first electrostatic actuator and wherein the second actuator is a second electrostatic actuator; wherein the pair of interconnections that connect the frame to a pair of supports so as to allow the frame to rotate about a second axis of rotation comprise a pair of hinges; and wherein the pair of hinges is formed so as to be entirely hidden by the rotatable element.
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25. A MEMS device comprising:
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a frame that supports a rotatable element so as to allow the rotatable element to rotate about a first axis of rotation; a first pair of interconnections that connect the frame to a pair of supports so as to allow the frame to rotate about a second axis of rotation; a first actuator for actuating rotation of the rotatable element in the first axis of rotation, and, a second actuator for actuating rotation of the frame in the second axis of rotation; wherein the first actuator is formed so as to rotate with the frame about the second axis of rotation; and wherein the first axis of rotation is offset from a centre line of the rotatable element. - View Dependent Claims (26)
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Specification