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MEMS device with independent rotation in two axes of rotation

  • US 9,036,229 B2
  • Filed: 12/27/2012
  • Issued: 05/19/2015
  • Est. Priority Date: 04/29/2008
  • Status: Active Grant
First Claim
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1. A MEMS device comprising:

  • a frame that supports a rotatable element so as to allow the rotatable element to rotate about a first axis of rotation;

    a first pair of interconnections that connect the frame to a pair of supports so as to allow the frame to rotate about a second axis of rotation;

    a first actuator for actuating rotation of the rotatable element in the first axis of rotation; and

    ,a second actuator for actuating rotation of the frame in the second axis of rotation;

    the first actuator formed so as to rotate with the frame about the second axis of rotation;

    the frame having insulating regions and at least two conductive regions that are electrically isolated from each other by the insulating regions thereby defining at least two conductive channels.

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