Micro-electro-mechanical systems micromirrors and micromirror arrays
First Claim
1. A micromirror comprising:
- a mirror structure comprising a mirror surface, and the mirror structure being rotatably mounted to a substrate by a first pivoting structure having a first pivot axis and a second pivoting structure having a second pivot axis;
a first comb drive for rotating the mirror structure about the first pivot axis and a second comb drive that is parallel to the first comb drive for rotating the mirror structure about the second pivot axis, each of the first and second comb drives comprising a fixed portion and a movable portion, the fixed portion of each comb drive being fixed and non-pivotable relative to the substrate; and
with the mirror structure in a non-actuated position, at least the mirror structure, the first pivoting structure and the moveable portions of each comb drive being in a common plane and the moveable portions of each comb drive being spaced outward in the common plane relative to the mirror surface.
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Accused Products
Abstract
A micromirror and micromirror array may have a first stationary structure, and a mirror structure connected to a first pivoting structure that pivots the mirror structure relative to the first stationary structure about a first axis of rotation. A first comb drive pivots the mirror structure about the first axis of rotation. The first comb drive has a first portion attached to the stationary structure and a second portion attached to the mirror structure, the first portion being electrically isolated from the second portion. The micromirror or micromirror array may be mounted to a Through Silicon Via (TSV) wafer having electrical connections that extend between a first side and a second side of the TSV wafer such that the first and second portions of each comb drive are electrically connected to the electrical connections.
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Citations
30 Claims
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1. A micromirror comprising:
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a mirror structure comprising a mirror surface, and the mirror structure being rotatably mounted to a substrate by a first pivoting structure having a first pivot axis and a second pivoting structure having a second pivot axis; a first comb drive for rotating the mirror structure about the first pivot axis and a second comb drive that is parallel to the first comb drive for rotating the mirror structure about the second pivot axis, each of the first and second comb drives comprising a fixed portion and a movable portion, the fixed portion of each comb drive being fixed and non-pivotable relative to the substrate; and with the mirror structure in a non-actuated position, at least the mirror structure, the first pivoting structure and the moveable portions of each comb drive being in a common plane and the moveable portions of each comb drive being spaced outward in the common plane relative to the mirror surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A micromirror comprising:
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a first support structure, a second support structure, and a mirror structure comprising a frame and a mirror, the frame circumscribing the mirror, the second support structure being fixed and non-pivotable relative to the first support structure; a first pivoting structure having a first axis of rotation and connecting the first support structure and the mirror structure; a first comb drive having a first portion attached to the first support structure and a second portion attached to the frame of the mirror structure, the first comb drive rotating the frame about the first axis of rotation; a second pivoting structure having a second axis of rotation and connecting the frame to the mirror; a second comb drive parallel to the first comb drive and positioned within the frame, the second comb drive having a first portion attached to the second support structure and a second portion attached to the mirror; with the mirror structure in a non-actuated position, at least the mirror structure, the first and the second pivoting structures, and the second portions of the first and second comb drives being in a common plane, the second portions of the first and the second comb drives being spaced outward in the common plane relative to the mirror. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A micromirror array, comprising:
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an array of micromirrors, each micromirror comprising; a first stationary structure; a mirror structure comprising a mirror surface, and the mirror structure being connected to a first pivoting structure that pivots the mirror structure relative to the first stationary structure about a first axis of rotation; a first comb drive pivoting the mirror structure about the first axis of rotation, the first comb drive having a first portion attached to the first stationary structure and a second portion attached to the mirror structure, the first portion being electrically isolated from the second portion; a second pivoting structure having a second axis of rotation connecting the mirror structure to the second portion of the first comb drive, the first axis of rotation being non-parallel to the second axis of rotation; a second comb drive pivoting the mirror structure about the second axis of rotation, the second comb drive being parallel to the first comb drive, the second comb drive having a first portion carried by a second stationary structure and a second portion carried by the mirror structure, the first portion being electrically isolated from the second portion and the first stationary structure being fixed and non-pivotable relative to the second stationary structure; with the mirror structure in a non-actuated position, at least the mirror structure, the first and the second pivoting structures, and the second portions of the first and the second comb drives being in a common plane and the first and second comb drives being spaced outward in the common plane relative to the mirror surface; a Through Silicon Via (TSV) wafer having electrical connections that extend between a first side and a second side of the TSV wafer, the array of micromirrors being mounted above the TSV wafer such that the first and second portions of each of the first and second comb drives are electrically connected to the electrical connections. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification