MEMS sensors with closed nodal anchors for operation in an in-plane contour mode
First Claim
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1. A MEMS sensor comprising:
- a substrate;
a resonant mass configured to resonate in an in-plane contour mode;
a first closed nodal anchor connecting the resonant mass to the substrate along a first predetermined closed nodal path on a first surface of the resonant mass;
a second closed nodal anchor connecting the resonant mass to the substrate along a second predetermined closed nodal path on a second surface of the resonant mass opposite the first surface; and
at least one transducer in communication with the first resonant mass for at least one of driving and sensing in-plane movement of the resonant mass, wherein at least a portion of the first surface of the resonant mass is configured for exposure to an external environment.
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Abstract
A MEMS sensor includes at least one closed nodal anchor along a predetermined closed nodal path on at least one surface of a resonant mass. The resonant mass may be configured to resonate substantially in an in-plane contour mode. Drive and/or sense electrodes may be disposed within a cavity formed at least in part by the resonant mass, the closed nodal anchor, and a substrate.
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Citations
23 Claims
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1. A MEMS sensor comprising:
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a substrate; a resonant mass configured to resonate in an in-plane contour mode; a first closed nodal anchor connecting the resonant mass to the substrate along a first predetermined closed nodal path on a first surface of the resonant mass; a second closed nodal anchor connecting the resonant mass to the substrate along a second predetermined closed nodal path on a second surface of the resonant mass opposite the first surface; and at least one transducer in communication with the first resonant mass for at least one of driving and sensing in-plane movement of the resonant mass, wherein at least a portion of the first surface of the resonant mass is configured for exposure to an external environment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 21, 22)
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18. A MEMS sensor comprising:
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a substrate; a plurality of resonant masses, each resonant mass configured to resonate in an in-plane contour mode and including (a) a first closed nodal anchor connecting the resonant mass to the substrate along a first predetermined closed nodal path on a first surface of the resonant mass and (b) a second closed nodal anchor connecting the resonant mass to the substrate along a second predetermined closed nodal path on a second surface of the resonant mass opposite the first surface; and a plurality of transducers in communication with the resonant masses for at least one of driving and sensing in-plane movement of the resonant masses, wherein at least a portion of the first surface of each resonant mass is configured for exposure to an external environment. - View Dependent Claims (19, 20)
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23. A method of fabricating a MEMS in-plane resonator comprising:
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forming a resonant mass supported by a substrate and configured to resonate substantially in an in-plane contour mode; forming a first closed nodal anchor connecting the resonant mass to the substrate along a first predetermined closed nodal path on a first surface of the resonant mass; forming a second closed nodal anchor connecting the resonant mass to the substrate along a second predetermined closed nodal path on a second surface of the resonant mass opposite the first surface; and forming at least one transducer in communication with the first resonant mass for at least one of driving and sensing in-plane movement of the resonant mass, wherein at least a portion of the first surface of the resonant mass is configured for exposure to an external environment.
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Specification