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Nanoscale switching device

  • US 9,040,948 B2
  • Filed: 09/16/2010
  • Issued: 05/26/2015
  • Est. Priority Date: 09/16/2010
  • Status: Active Grant
First Claim
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1. A nanoscale switching device comprising:

  • a first electrode of a nanoscale width;

    a second electrode of a nanoscale width;

    an active region disposed between the first and second electrodes, the active region containing a switching material;

    an area within the active region that constrains current flow between the first electrode and the second electrode to a central portion of the active region; and

    an interlayer dielectric layer formed of a dielectric material and disposed between the first and second electrodes outside the active region;

    wherein the area that constrains current flow within the active region comprises a lateral oxidation region of the switching material.

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