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Low noise amplifier for multiple channels

  • US 9,041,463 B2
  • Filed: 12/17/2012
  • Issued: 05/26/2015
  • Est. Priority Date: 12/16/2011
  • Status: Active Grant
First Claim
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1. A signal transmission system for use with a MEMS device having a beam movable in a plurality of axes, the system comprising:

  • a first-axis variable capacitor disposed to respond to motion of the beam along a first axis, the first-axis variable capacitor driven by a periodic first-axis drive signal having a first-channel drive frequency;

    a second-axis variable capacitor disposed to respond to motion of the beam along a second axis, the second-axis variable capacitor driven by a periodic second-axis drive signal having a second-channel drive frequency;

    an amplifier having an amplifier input electrically coupled to the first-axis variable capacitor and the second-axis variable capacitor, to amplify first-axis motion and second-axis motion signals from the first-axis variable capacitor and the second-axis variable capacitor, respectively;

    a plurality of demodulators operatively coupled with the amplifier for receiving amplified input signals from the amplifier, each demodulator comprising a switching arrangement, the plurality of demodulators comprising;

    a first-channel demodulator driven by the periodic first-axis drive signal and operable to demodulate the amplified motion signals to produce a first-axis output signal including second-axis noise; and

    a second-channel demodulator driven by the periodic second-axis drive signal and operable to demodulate the amplified motion signal to produce a second-axis output signal including first-axis noise;

    a first-channel low-pass filter coupled to the first-channel demodulator, the first-channel low-pass filter having a cutoff frequency below the frequency of the second-axis noise generated by the second-channel demodulator; and

    a second-channel low-pass filter coupled to the second-channel demodulator, the second-channel low-pass filter having a cutoff frequency below the frequency of the first-axis noise generated by the first-channel demodulator;

    the filters mitigating the noise on their respective channels.

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