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Fast auto-focus in imaging

  • US 9,041,791 B2
  • Filed: 02/01/2011
  • Issued: 05/26/2015
  • Est. Priority Date: 02/01/2011
  • Status: Active Grant
First Claim
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1. A method for automatically focusing multiple images of one or more objects on a substrate, the method comprising:

  • a) obtaining, by a processor, a representative focal distance for a first location on the substrate based on a set of focal distances at known locations on the substrate, wherein the representative focal distance is estimated as a weighted average of at least two focal distances from the set of focal distances at known locations, wherein a weight for a given focal distance is calculated based on a distance of the corresponding location from the first location;

    b) acquiring, by an image acquisition device, a set of at least two images of the first location, wherein the images are each acquired using a different focal distance at an offset from the representative focal distance;

    c) estimating, by a processor, an ideal focal distance corresponding to the first location based on comparing a quality of focus for each of the images; and

    d) storing the estimated ideal focal distance and the first location in the set of focal distances at known locations.

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