Method of manufacturing a flexible circuit electrode array
First Claim
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1. A method of making a flexible circuit electrode array for neural stimulation comprising:
- depositing a polymer base layer;
depositing a metal layer comprising layers of titanium and platinum on the polymer base layer;
depositing photoresist on the metal layer;
exposing the photoresist;
patterning the metal by wet etch with Aqua Regia to form metal tracesactivating the polymer base layer by deimidization; and
depositing a polymer top layer on the polymer base layer and the metal traces.
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Abstract
Polymer materials make useful materials as electrode array bodies for neural stimulation. They are particularly useful for retinal stimulation to create artificial vision. Regardless of which polymer is used, the basic construction method is the same. A layer of polymer is laid down. A layer of metal is applied to the polymer and patterned to create electrodes and leads for those electrodes. A second layer of polymer is applied over the metal layer and patterned to leave openings for the electrodes, or openings are created later by means such as laser ablation. Hence the array and its supply cable are formed of a single body.
47 Citations
10 Claims
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1. A method of making a flexible circuit electrode array for neural stimulation comprising:
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depositing a polymer base layer; depositing a metal layer comprising layers of titanium and platinum on the polymer base layer; depositing photoresist on the metal layer; exposing the photoresist; patterning the metal by wet etch with Aqua Regia to form metal traces activating the polymer base layer by deimidization; and depositing a polymer top layer on the polymer base layer and the metal traces. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification