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Micromechanical element which can be deflected

  • US 9,045,329 B2
  • Filed: 11/25/2005
  • Issued: 06/02/2015
  • Est. Priority Date: 11/25/2005
  • Status: Active Grant
First Claim
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1. A deflectable micromechanical element, comprising:

  • a substrate defining a plane, where a first axis extends parallel to the substrate and a second axis extends parallel to the substrate and orthogonal to the first axis; and

    a suspension supporting the substrate and including at least first and second spring systems, wherein;

    each of the first and second spring systems is formed with levers which are pivotally connected to torsion spring elements, such that the substrate is permitted to exhibit oscillating translation deflection movement in a direction perpendicular to the plane of the substrate, and the levers have a larger mechanical resistance torque than the torsion spring elements in the perpendicular direction of the substrate,at least one of the levers of each of the first and second spring systems extends parallel to the first axis and directly engages a respective peripheral edge of the substrate,at least one of the torsion spring elements of each of the first and second spring systems is fixedly clamped at one end thereof,the torsion spring elements of each of the first and second spring systems are aligned parallel to the second axis and orthogonal to the first axis,the respective levers and torsion spring elements of each of the first and second spring systems are arranged symmetrically about the first axis, such that the first axis is an axis of symmetry of the micromechanical element.

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