RF plasma reactor having a distribution chamber with at least one grid

• US 9,045,828 B2
• Filed: 10/23/2007
• Issued: 06/02/2015
• Est. Priority Date: 04/26/2000
• Status: Expired due to Fees

• Current Assignee: TEL Solar AG (OC Oerlikon Corporation AG)
• Original Assignee: TEL Solar AG (OC Oerlikon Corporation AG)
• Inventors: Turlot, Emmanuel, Chevrier, Jean-Baptiste, Schmitt, Jacques, Barreiro, Jean
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US11/877,419
• Publication Number:
  US 20080093341A1
• Time in Patent Office: 2,779 Days
• Field of Search: 118/723.E, 118/723.R, 15634533-34534, 15634543-34547
• US Class Current: 1/1
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45561 Gas plumbing upstream of the reaction chamber
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/507 using external electrodes, e.g. in tunnel type reactors
• CPC Class Codes: C23C 16/509 using internal electrodes
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/32697 Electrostatic control

Abstract

A plasma reactor has a reactor vessel and a pair of electrodes in the form of spaced apart and oppositely disposed metallic surfaces defining therebetween a plasma discharge space. At least one of the metallic surfaces is the surface of a metallic plate having a plurality of gas feed openings extending through the metallic surface towards said discharge space and from a distribution chamber extending along the plate opposite the discharge space. The distribution chamber has a wall opposite and distant from the plate and includes a gas inlet arrangement with a plurality of gas inlet openings distributed along the wall and connected to one or more gas feed lines to the reactor. A gas flow resistant coefficient between the one or more gas feed lines and at least a predominant portion of the connected inlet openings are at least substantially equal.

Claims

1. A plasma reactor comprising a reactor vessel and therein a pair of electrodes consisting of spaced apart and oppositely disposed metallic surfaces defining a plasma discharge space, at least one of said metallic surfaces being the surface of a metallic plate having a multitude of gas feed openings therethrough and through said metallic surface towards said discharge space and from a distribution chamber extending along said plate opposite said discharge space;

said distribution chamber having a wall opposite and distant from said plate and comprising a gas inlet arrangement with a multitude of gas inlet openings distributed along said wall and connected to at least one gas feed line to said reactor, wherein the plasma reactor comprises means for increasing the distribution of gas feed to the plasma discharge space along the peripheral border area of the plasma discharge space, said means comprising;

said wall comprising a lateral rim portion extending towards and beyond the periphery of said plate and distant therefrom, said distribution chamber communicating by an opening arrangement with the interspace between said lateral rim portion and said periphery of said plate, said opening arrangement extending substantially parallel to said plate and substantially perpendicularly to said rim portion.

2. The plasma reactor of claim 1, further comprising an electric energy feed arrangement to said two metallic surfaces, said wall and said plate being electrically isolated from each other.

3. The plasma reactor of claim 1, at least one grid member being arranged within said distribution chamber along and distant from said plate and from said wall, said grid member being electrically isolated from said wall and from said plate.

4. The plasma reactor of claim 1, wherein at least a number of said gas inlet openings distributed along said wall are connected to a common gas feed line, the gas flow resistance between said gas feed line and at least a predominant part of said inlet opening connected thereto being equal.

5. The plasma reactor of claim 1, wherein at least a part of said gas feed openings through said plate cooperate with removable flow resistance increasing inserts.

6. The plasma reactor of claim 2, at least one grid member being arranged within said distribution chamber along and distant from said plate and from said wall, said grid member being electrically isolated from said wall and from said plate.

7. The plasma reactor of claim 2, wherein at least a number of said gas inlet openings distributed along said wall are connected to a common gas feed line, the gas flow resistance between said gas feed line and at least a predominant part of said inlet opening connected thereto being equal.

8. The plasma reactor of claim 3, wherein at least a number of said gas inlet openings distributed along said wall are connected to a common gas feed line, the gas flow resistance between said gas feed line and at least a predominant part of said inlet opening connected thereto being equal.

9. The plasma reactor of claim 2, wherein at least a part of said gas feed openings through said plate cooperate with removable flow resistance increasing inserts.

10. The plasma reactor of claim 3, wherein at least a part of said gas feed openings through said plate cooperate with removable flow resistance increasing inserts.

11. The plasma reactor of claim 4, wherein at least a part of said gas feed openings through said plate cooperate with removable flow resistance increasing inserts.

13. The plasma reactor of claim 1, wherein the electrodes are fed with electric energy via a distinct power feed.

12. A plasma reactor comprising a reactor vessel and therein a pair of electrodes consisting of spaced apart and oppositely disposed metallic surfaces defining a plasma discharge space, at least one of said metallic surfaces being the surface of a metallic plate having a multitude of gas feed openings therethrough and through said metallic surface towards said discharge space and from a distribution chamber extending along said plate opposite said discharge space;

said distribution chamber having a wall opposite and distant from said plate and comprising a gas inlet arrangement with a multitude of gas inlet openings distributed along said wall and connected to at least one gas feed line to said reactor, at least one grid member being arranged within said distribution chamber along and distant from said plate and from said wall, said wall having an electroconductive surface and said grid member being electrically isolated from said wall and from said plate, wherein said grid member is made of dielectric material or of electroconductive material operated at a floating electric potential.