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Membrane-based fluid control in microfluidic devices

  • US 9,046,192 B2
  • Filed: 01/31/2008
  • Issued: 06/02/2015
  • Est. Priority Date: 01/31/2007
  • Status: Active Grant
First Claim
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1. A capacitive element for a microfluidic device, comprising:

  • a substrate including a channel within the substrate defining a flow-control cavity and a bypass structure, wherein the channel includes a bottom, side walls, and a partial ceiling, wherein the partial ceiling extends over at least a portion of the channel;

    a compliant membrane, surrounding at least a portion of the flow-control cavity, for capacitively regulating fluid flow through the flow-control cavity;

    wherein the bypass structure is separated from the membrane by the partial ceiling and is configured to allow the fluid to flow through the flow-control cavity when the compliant membrane is collapsed into the flow-control cavity; and

    a displacement-limiting element, coupled to the substrate and uncoupled from the compliant membrane, for limiting the outward displacement of the compliant membrane away from the flow-control cavity.

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