Membrane-based fluid control in microfluidic devices
First Claim
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1. A capacitive element for a microfluidic device, comprising:
- a substrate including a channel within the substrate defining a flow-control cavity and a bypass structure, wherein the channel includes a bottom, side walls, and a partial ceiling, wherein the partial ceiling extends over at least a portion of the channel;
a compliant membrane, surrounding at least a portion of the flow-control cavity, for capacitively regulating fluid flow through the flow-control cavity;
wherein the bypass structure is separated from the membrane by the partial ceiling and is configured to allow the fluid to flow through the flow-control cavity when the compliant membrane is collapsed into the flow-control cavity; and
a displacement-limiting element, coupled to the substrate and uncoupled from the compliant membrane, for limiting the outward displacement of the compliant membrane away from the flow-control cavity.
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Abstract
A microfluidic device may include a substrate that defines a flow-control cavity and first and second channels in fluid communication with the flow-control cavity. A compliant membrane for regulating fluid flow through the flow-control cavity may surround at least a portion of the flow-control cavity.
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Citations
25 Claims
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1. A capacitive element for a microfluidic device, comprising:
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a substrate including a channel within the substrate defining a flow-control cavity and a bypass structure, wherein the channel includes a bottom, side walls, and a partial ceiling, wherein the partial ceiling extends over at least a portion of the channel; a compliant membrane, surrounding at least a portion of the flow-control cavity, for capacitively regulating fluid flow through the flow-control cavity; wherein the bypass structure is separated from the membrane by the partial ceiling and is configured to allow the fluid to flow through the flow-control cavity when the compliant membrane is collapsed into the flow-control cavity; and a displacement-limiting element, coupled to the substrate and uncoupled from the compliant membrane, for limiting the outward displacement of the compliant membrane away from the flow-control cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A microfluidic device, comprising:
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a discharge line; a pump for discharging and retracting fluid through the discharge line; and a capacitive element for modifying fluid flow through the discharge line, the capacitive element comprising; a compliant membrane that surrounds at least a portion of a channel formed within a substrate of the capacitive element, the channel including a flow-control cavity and a bypass structure; wherein the channel includes a bottom, side walls, and a partial ceiling extending over at least a portion of the channel, and wherein the bypass structure is separated from the membrane by the partial ceiling and is configured to allow the fluid to flow through the flow-control cavity when the compliant membrane is collapsed into the flow-control cavity; and an adjustable displacement-limiting element, coupled to the substrate of the capacitive element and uncoupled from the compliant membrane, for limiting an outward displacement of the compliant membrane away from the cavity. - View Dependent Claims (12, 13)
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14. A method of controlling fluid flow within a microfluidic device, the method comprising:
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a) passing fluid through a microfluidic device comprising i) a compliant membrane that surrounds at least a portion of a channel formed within a substrate of the microfluidic device, the channel including a flow-control cavity and a bypass structure, ii) wherein the channel includes a bottom, side walls, and a partial ceiling extending over at least a portion of the channel, and wherein the bypass structure is separated from the membrane by the partial ceiling and is configured to allow the fluid to flow through the flow-control cavity when the compliant membrane is collapsed into the flow-control cavity, and iii) a displacement limiting element coupled to the substrate of the microfluidic device and uncoupled from the compliant membrane; and b) capacitively displacing at least a portion of the compliant membrane to control a rate of fluid flow through the microfluidic device while limiting an outward displacement of the compliant membrane away from the cavity with the displacement-limiting element.
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15. A capacitive element for a microfluidic device, comprising:
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a substrate including a channel within the substrate defining a flow-control cavity and a bypass structure, wherein the channel includes a bottom, side walls, and a partial ceiling, wherein the partial ceiling extends over at least a portion of the channel; a compliant membrane, surrounding at least a portion of the flow control cavity, for capacitively regulating fluid flow through the flow-control cavity; wherein the bypass structure is separated from the membrane by the partial ceiling and is configured to allow the fluid to flow through the flow control cavity when the compliant membrane is collapsed into the flow-control cavity. - View Dependent Claims (16, 17, 18, 19, 20, 21, 23, 24)
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22. A microfluidic device, comprising:
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a discharge line; a pump for discharging and retracting fluid through the discharge line; and a capacitive element for modifying fluid flow through the discharge line, the capacitive element comprising; a compliant membrane that surrounds at least a portion of a channel formed within a substrate of the capacitive element, the channel including a flow-control cavity and a bypass structure; and wherein the channel includes a bottom, side walls, and a partial ceiling extending over at least a portion of the channel, and wherein the bypass structure is separated from the membrane by the partial ceiling and is configured to allow the fluid to flow through the flow-control cavity when the compliant membrane is collapsed into the flow-control cavity.
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25. A method of controlling fluid flow within a microfluidic device, the method comprising:
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a) passing fluid through a microfluidic device comprising i) a compliant membrane that surrounds at least a portion of a channel formed within a substrate of the microfluidic device, the channel including a flow-control cavity and a bypass structure, ii) wherein the channel includes a bottom, side walls, and a partial ceiling extending over at least a portion of the channel, and wherein the bypass structure is separated from the membrane by the partial ceiling and is configured to allow the fluid to flow through the flow-control cavity when the compliant membrane is collapsed into the flow-control cavity, and iii) a displacement limiting element coupled to the substrate of the microfluidic device and uncoupled from the compliant membrane; and b) capacitively displacing at least a portion of the compliant membrane to control a rate of fluid flow through the microfluidic device.
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Specification