Micro-electro-mechanical-system device with oscillating assembly
First Claim
1. An MEMS device, being adapted to control the displacement direction of two oscillating units comprising:
- at least one base;
at least one lever;
at least one first assembly of springs including;
two elastic members, each of the elastic members connecting the at least one lever and the at least one base; and
at least one support connecting the at least one lever and the two elastic members, wherein the at least one support is surrounded by the two elastic members, the at least one lever and the at least one base, the at least one lever is connected to one portion of the at least one support and the two elastic members are respectively connected to other portions of the at least one support; and
two oscillating units, wherein one oscillating unit is connected to an end of the at least one lever and the other oscillating unit is connected to the other end of the at least one lever,wherein the at least one first assembly of springs is connected to the at least one lever, so the at least one lever can use the at least one first assembly of springs to rotate by treating a third axis as the axis of rotation to drive the oscillating unites to move back and forth in opposite directions with respect to each other.
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Accused Products
Abstract
A micro-electro-mechanical-system (MEMS) device comprising two proof masses disposed in the first frame, such that the MEMS device with oscillating assemblies senses the angular velocity in the two axes, respectively. The MEMS device with oscillating assemblies further comprises a lever structure and two oscillating assemblies connecting at two opposite ends of the lever structure, such that the oscillating assemblies move in opposite directions synchronously. The MEMS device with oscillating assemblies further comprises a spring assembly connected between the proof mass and a movable electrode, restricting the proof mass to drive the movable electrode to only move in a specific direction.
43 Citations
29 Claims
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1. An MEMS device, being adapted to control the displacement direction of two oscillating units comprising:
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at least one base; at least one lever; at least one first assembly of springs including; two elastic members, each of the elastic members connecting the at least one lever and the at least one base; and at least one support connecting the at least one lever and the two elastic members, wherein the at least one support is surrounded by the two elastic members, the at least one lever and the at least one base, the at least one lever is connected to one portion of the at least one support and the two elastic members are respectively connected to other portions of the at least one support; and two oscillating units, wherein one oscillating unit is connected to an end of the at least one lever and the other oscillating unit is connected to the other end of the at least one lever, wherein the at least one first assembly of springs is connected to the at least one lever, so the at least one lever can use the at least one first assembly of springs to rotate by treating a third axis as the axis of rotation to drive the oscillating unites to move back and forth in opposite directions with respect to each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification