Method for manufacturing pressure sensing device
First Claim
1. A method for manufacturing a pressure sensing device comprising:
- preparing a sensor unit and a mounting substrate,the sensor unit including;
a membrane body; and
an element unit provided on the membrane body,the element unit including;
a first electrode;
a second electrode; and
a first magnetic layer provided between the first electrode and the second electrode and having magnetization in a first direction;
the mounting substrate including;
a base;
a first electrode pad provided on the base; and
a second electrode pad provided on the base and provided apart from the first electrode pad; and
joining the first electrode pad to the first electrode while heated, and joining the second electrode pad to the second electrode while heated, with an external magnetic field along the first direction applied to the sensor unit.
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Accused Products
Abstract
According to one embodiment, a method for manufacturing a pressure sensing device includes preparing a sensor unit and a mounting substrate. The sensor unit includes: a membrane body; and an element unit provided on the membrane body. The element unit includes: a first electrode; a second electrode; and a first magnetic layer provided between the first electrode and the second electrode and having magnetization in a first direction. The mounting substrate includes: a base; a first electrode pad provided on the base; and a second electrode pad provided on the base and provided apart from the first electrode pad. The method further includes joining the first electrode pad to the first electrode while heated, and joining the second electrode pad to the second electrode while heated, with an external magnetic field along the first direction applied to the sensor unit.
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Citations
20 Claims
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1. A method for manufacturing a pressure sensing device comprising:
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preparing a sensor unit and a mounting substrate, the sensor unit including; a membrane body; and an element unit provided on the membrane body, the element unit including;
a first electrode;
a second electrode; and
a first magnetic layer provided between the first electrode and the second electrode and having magnetization in a first direction;the mounting substrate including; a base; a first electrode pad provided on the base; and a second electrode pad provided on the base and provided apart from the first electrode pad; and joining the first electrode pad to the first electrode while heated, and joining the second electrode pad to the second electrode while heated, with an external magnetic field along the first direction applied to the sensor unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for manufacturing a pressure sensing device comprising:
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preparing a sensor unit and a mounting substrate, the sensor unit including; a membrane body; and an element unit provided on the membrane body, the element unit including;
a first electrode having a first portion and a second portion;
a second electrode having a third portion and a fourth portion;
a first magnetic layer provided between the second portion and the third portion and having magnetization in a first direction;
a second magnetic layer provided between the first magnetic layer and the third portion; and
a non-magnetic layer provided between the first magnetic layer and the second magnetic layer,an angle between a magnetization direction of the first magnetic layer and a magnetization direction of the second magnetic layer being changed according to a strain of the membrane body; the mounting substrate including; a base; a first electrode pad provided on the base; and a second electrode pad provided on the base and provided apart from the first electrode pad; and joining the first electrode pad to the first portion while heated, and joining the second electrode pad to the fourth portion while heated, with an external magnetic field along the first direction applied to the sensor unit. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification