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Method of fabricating optical devices using laser treatment

  • US 9,048,170 B2
  • Filed: 11/09/2010
  • Issued: 06/02/2015
  • Est. Priority Date: 11/09/2010
  • Status: Active Grant
First Claim
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1. An optical device comprising:

  • a gallium and nitrogen containing substrate member having a crystalline surface region and a backside opposite the crystalline surface region;

    a laser stripe region overlying a portion of the crystalline surface region;

    at least one laser scribe line on the backside and underlying at least a portion of the laser stripe region, the at least one laser scribe line comprising a recessed region extending partially through a thickness of the gallium and nitrogen containing substrate, wherein portions of the backside within a vicinity of the at least one laser scribe line have a higher conductivity than portions of the backside outside the vicinity of the at least one laser scribe line; and

    a metallization material contacting the backside and one or more portions of the at least one laser scribe line to form a metal contact.

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