Light emitting device, method of manufacturing the same, and manufacturing apparatus therefor

• US 9,048,203 B2
• Filed: 07/07/2011
• Issued: 06/02/2015
• Est. Priority Date: 12/28/2001
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Hamatani, Toshiji, Takayama, Toru
• Primary Examiner(s): Tran, Tan N
• Assistant Examiner(s): Wilson, Scott R
• Application Number:
  US13/177,647
• Publication Number:
  US 20110266548A1
• Time in Patent Office: 1,426 Days
• Field of Search: None
• US Class Current: 1/1
• CPC Class Codes: H01L 21/67207 comprising a chamber adapted to a particular process
• CPC Class Codes: H10K 2102/3026 Top emission
• CPC Class Codes: H10K 50/125 specially adapted for multicolour light emission, e.g. for emitting white light
• CPC Class Codes: H10K 50/13 comprising stacked EL layers within one EL unit
• CPC Class Codes: H10K 50/84 Passivation; Containers; Encapsulations
• CPC Class Codes: H10K 50/841 Self-supporting sealing arrangements
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 50/865 comprising light absorbing layers, e.g. light-blocking layers
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/123 Connection of the pixel electrodes to the thin film transistors [TFT]
• CPC Class Codes: H10K 59/124 Insulating layers formed between TFT elements and OLED elements
• CPC Class Codes: H10K 59/17 Passive-matrix OLED displays
• CPC Class Codes: H10K 59/32 Stacked devices having two or more layers, each emitting at different wavelengths
• CPC Class Codes: H10K 59/35 comprising red-green-blue [RGB] subpixels
• CPC Class Codes: H10K 59/353 characterised by the geometrical arrangement of the RGB subpixels
• CPC Class Codes: H10K 59/38 comprising colour filters or colour changing media [CCM]
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass

Abstract

A light emitting device having high definition, a high aperture ratio, and high reliability is provided. The present invention achieves high definition and a high aperture ratio with a full color flat panel display using red, green, and blue color emission light by intentionally forming laminate portions, wherein portions of different organic compound layers of adjacent light emitting elements overlap with each other, without depending upon the method of forming the organic compound layers or the film formation precision.

Claims

1. A light emitting device comprising:

a first substrate and a second substrate;

a first transistor and a second transistor over the first substrate;

an insulating film over the first transistor and the second transistor;

a first electrode over the insulating film, and electrically connected to the first transistor through a first contact hole in the insulating film;

a second electrode over the insulating film, and electrically connected to the second transistor through a second contact hole in the insulating film;

an insulator portion covering an edge portion of the first electrode and an edge portion of the second electrode, and filling a balance of the first contact hole;

a first EL layer on and in contact with the first electrode and the insulator portion;

a second EL layer on and in contact with the second electrode and the insulator portion;

a first colorization layer over the first substrate and under the second substrate so that the first colorization layer overlaps the first EL layer and is interposed between the first EL layer and the second substrate;

a second colorization layer over the first substrate and under the second substrate so that the second colorization layer overlaps the second EL layer and is interposed between the second EL layer and the second substrate; and

a shading portion between the first colorization layer and the second colorization layer, overlapping the insulator portion and interposed between the insulator portion and the second substrate,

wherein the shading portion overlaps the first contact hole, and

wherein the second substrate is capable of transmitting light so that an observer could perceive light emitted by the first EL layer and by the second EL layer from above the second substrate.

5. The light emitting device according to claim 1, further comprising a protective film over the first EL layer and the second EL layer.

9. The light emitting device according to claim 5, wherein the protective film is a silicon nitride film.

13. The light emitting device according to claim 1, wherein the first transistor is a first thin film transistor and the second transistor is a second thin film transistor.

15. The light emitting device according to claim 1, wherein each of the first electrode and the second electrode comprises a transparent conductive oxide.

22. The light emitting device according to claim 1, wherein the shading portion is an organic material film containing a black color pigment.

26. The light emitting device according to claim 1, wherein the insulator portion comprises an organic material.

30. The light emitting device according to claim 1, wherein the insulator portion comprises an inorganic material.

34. The light emitting device according to claim 1,

wherein the first EL layer is adapted to emit light of a first color;

and

wherein the second EL layer is adapted to emit light of a second color different from the first color.

38. An electronic equipment having the light emitting device according to claim 1, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a portable information terminal, a player using a recording medium, and a display.

42. The light emitting device according to claim 1, wherein the insulator portion overlaps a first region where the first electrode enters into electrical contact with the first transistor.

2. A light emitting device comprising:

a first substrate and a second substrate;

a first transistor and a second transistor over the first substrate;

an insulating film over the first transistor and the second transistor;

a first electrode over the insulating film, and electrically connected to the first transistor through a first contact hole in the insulating film;

a second electrode over the insulating film, and electrically connected to the second transistor through a second contact hole in the insulating film;

an insulator portion covering an edge portion of the first electrode and an edge portion of the second electrode, and filling a balance of the first contact hole;

a first EL layer on and in contact with the first electrode and the insulator portion;

a second EL layer on and in contact with the second electrode and the insulator portion;

a third electrode over the first EL layer and the second EL layer;

a first colorization layer over the first substrate and under the second substrate so that the first colorization layer overlaps the first EL layer and is interposed between the third electrode and the second substrate;

a second colorization layer over the first substrate and under the second substrate so that the second colorization layer overlaps the second EL layer and is interposed between the third electrode and the second substrate; and

a shading portion between the first colorization layer and the second colorization layer, overlapping the insulator portion and interposed between the third electrode and the second substrate,

wherein the shading portion overlaps the first contact hole, and

wherein the third electrode and the second substrate are capable of transmitting light so that an observer could perceive light emitted by the first EL layer and by the second EL layer from above the second substrate.

14. The light emitting device according to claim 2, wherein the first transistor is a first thin film transistor and the second transistor is a second thin film transistor.

16. The light emitting device according to claim 2, wherein each of the first electrode and the second electrode comprises a transparent conductive oxide.

19. The light emitting device according to claim 2, wherein the third electrode comprises magnesium and silver.

23. The light emitting device according to claim 2, wherein the shading portion is an organic material film containing a black color pigment.

27. The light emitting device according to claim 2, wherein the insulator portion comprises an organic material.

31. The light emitting device according to claim 2, wherein the insulator portion comprises an inorganic material.

35. The light emitting device according to claim 2,

wherein the first EL layer is adapted to emit light of a first color;

and

wherein the second EL layer is adapted to emit light of a second color different from the first color.

39. An electronic equipment having the light emitting device according to claim 2, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a portable information terminal, a player using a recording medium, and a display.

43. The light emitting device according to claim 2, wherein the insulator portion overlaps a first region where the first electrode enters into electrical contact with the first transistor.

3. A light emitting device comprising:

a first substrate and a second substrate;

a first semiconductor film, a second semiconductor film, a first gate electrode and a second gate electrode over the first substrate;

a gate insulating film interposed between the first semiconductor film and the first gate electrode, and between the second semiconductor film and the second gate electrode;

a first insulating film over the first semiconductor film, the second semiconductor film, the first gate electrode, the second gate electrode and the gate insulating film;

one of a first source electrode and a first drain electrode over the first insulating film and electrically connected to the first semiconductor film through a first contact hole in the first insulating film;

one of a second source electrode and a second drain electrode over the first insulating film and electrically connected to the second semiconductor film through a second contact hole in the first insulating film;

a second insulating film over the one of the first source electrode and the first drain electrode, and over the one of the second source electrode and the second drain electrode;

a first electrode over the second insulating film and electrically connected to the one of the first source electrode and the first drain electrode through a first contact hole in the second insulating film;

a second electrode over the second insulating film and electrically connected to the one of the second source electrode and the second drain electrode through a second contact hole in the second insulating film;

an insulator portion over the second insulating film, covering an edge portion of the first electrode and an edge portion of the second electrode;

a first EL layer on and in contact with the first electrode and the insulator portion;

a second EL layer on and in contact with the second electrode and the insulator portion;

a third electrode over the first EL layer and the second EL layer; and

a first colorization layer over the first substrate and under the second substrate so that the first colorization layer overlaps the first EL layer and is interposed between the third electrode and the second substrate;

a second colorization layer over the first substrate and under the second substrate so that the second colorization layer overlaps the second EL layer and is interposed between the third electrode and the second substrate; and

a shading portion between the first colorization layer and the second colorization layer, overlapping the insulator portion and interposed between the third electrode and the second substrate,

wherein the shading portion overlaps the first contact hole in the second insulating film, and

wherein the third electrode and the second substrate are capable of transmitting light so that an observer could perceive light emitted by the first EL layer and by the second EL layer from above the second substrate.

6. The light emitting device according to claim 3, further comprising a protective film over the third electrode.

7. The light emitting device according to claim 3, further comprising a protective film over the third electrode.

10. The light emitting device according to claim 6, wherein the protective film is a silicon nitride film.

11. The light emitting device according to claim 7, wherein the protective film is a silicon nitride film.

17. The light emitting device according to claim 3, wherein each of the first electrode and the second electrode comprises a transparent conductive oxide.

20. The light emitting device according to claim 3, wherein the third electrode comprises magnesium and silver.

24. The light emitting device according to claim 3, wherein the shading portion is an organic material film containing a black color pigment.

28. The light emitting device according to claim 3, wherein the insulator portion comprises an organic material.

32. The light emitting device according to claim 3, wherein the insulator portion comprises an inorganic material.

36. The light emitting device according to claim 3,

wherein the first EL layer is adapted to emit light of a first color;

and

wherein the second EL layer is adapted to emit light of a second color different from the first color.

40. An electronic equipment having the light emitting device according to claim 3, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a portable information terminal, a player using a recording medium, and a display.

44. The light emitting device according to claim 3, wherein the insulator portion overlaps a first region where the first electrode enters into electrical contact with the one of the first source electrode and the first drain electrode.

4. A light emitting device comprising:

a first substrate and a second substrate;

a first semiconductor film and a second semiconductor film over the first substrate;

a gate insulating film over the first semiconductor film and the second semiconductor film;

a first gate electrode and a second gate electrode over the gate insulating film;

a first insulating film formed over the first gate electrode and the second gate electrode;

a first source electrode and a first drain electrode over the first insulating film and electrically connected to the first semiconductor film;

a second source electrode and a second drain electrode over the first insulating film and electrically connected to the second semiconductor film;

a second insulating film over the first source electrode, the first drain electrode, the second source electrode and the second drain electrode;

a first electrode over the second insulating film and electrically connected to one of the first source electrode and the first drain electrode;

a second electrode over the second insulating film and electrically connected to one of the second source electrode and the second drain electrode;

an insulator portion over the second insulating film, covering an edge portion of the first electrode and an edge portion of the second electrode;

a first EL layer on and in contact with the first electrode and the insulator portion;

a second EL layer on and in contact with the second electrode and the insulator portion;

a third electrode over the first EL layer and the second EL layer; and

a first colorization layer over the first substrate and under the second substrate so that the first colorization layer overlaps the first EL layer and is interposed between the third electrode and the second substrate;

a second colorization layer over the first substrate and under the second substrate so that the second colorization layer overlaps the second EL layer and is interposed between the third electrode and the second substrate; and

a shading portion between the first colorization layer and the second colorization layer, overlapping the insulator portion and interposed between the third electrode and the second substrate,

wherein the shading portion overlaps a region where the first electrode enters into electrical contact with the one of the first source electrode and the first drain electrode, and

wherein the third electrode and the second substrate are capable of transmitting light so that an observer could perceive light emitted by the first EL layer and by the second EL layer from above the second substrate.

8. The light emitting device according to claim 4, further comprising a protective film over the third electrode.

12. The light emitting device according to claim 8, wherein the protective film is a silicon nitride film.

18. The light emitting device according to claim 4, wherein each of the first electrode and the second electrode comprises a transparent conductive oxide.

21. The light emitting device according to claim 4, wherein the third electrode comprises magnesium and silver.

25. The light emitting device according to claim 4, wherein the shading portion is an organic material film containing a black color pigment.

29. The light emitting device according to claim 4, wherein the insulator portion comprises from an organic material.

33. The light emitting device according to claim 4, wherein the insulator portion comprises an inorganic material.

37. The light emitting device according to claim 4,

wherein the first EL layer is adapted to emit light of a first color;

and

wherein the second EL layer is adapted to emit light of a second color different from the first color.

41. An electronic equipment having the light emitting device according to claim 4, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a portable information terminal, a player using a recording medium, and a display.

45. The light emitting device according to claim 4, wherein the insulator portion overlaps the region.