Integrated circuit capacitor and method
First Claim
Patent Images
1. A capacitor comprising:
- a substrate having a capacitor region and an interconnect region;
a series of ridges and trenches at the capacitor region;
the interconnect region located laterally from the capacitor region;
the interconnect region and the capacitor region having a capacitor foundation surface;
the capacitor foundation surface having a serpentine cross-sectional shape on the series of ridges and trenches at the capacitor region;
a serpentine, stacked plate capacitor assembly, comprising at least two electrically conductive electrode layers and dielectric layers separating the electrode layers, at the capacitor foundation surface of the capacitor region, the serpentine, stacked plate capacitor assembly creating a stack of one or more capacitors; and
electrical conductors at the interconnect region electrically connected to the electrode layers for access to the electrode layers of the capacitor assembly.
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Abstract
An example of a capacitor includes a series of ridges and trenches and an interconnect region on the integrated circuit substrate. The series of ridges and trenches and the interconnect region have a capacitor foundation surface with a serpentine cross-sectional shape on the series of ridges and trenches. Electrical conductors are electrically connected to the electrode layers from the interconnect region for access to the electrode layers of the capacitor assembly.
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Citations
11 Claims
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1. A capacitor comprising:
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a substrate having a capacitor region and an interconnect region; a series of ridges and trenches at the capacitor region; the interconnect region located laterally from the capacitor region; the interconnect region and the capacitor region having a capacitor foundation surface; the capacitor foundation surface having a serpentine cross-sectional shape on the series of ridges and trenches at the capacitor region; a serpentine, stacked plate capacitor assembly, comprising at least two electrically conductive electrode layers and dielectric layers separating the electrode layers, at the capacitor foundation surface of the capacitor region, the serpentine, stacked plate capacitor assembly creating a stack of one or more capacitors; and electrical conductors at the interconnect region electrically connected to the electrode layers for access to the electrode layers of the capacitor assembly. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A capacitor comprising:
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a substrate having a capacitor region and an interconnect region; a series of ridges and trenches at the capacitor region; the interconnect region located laterally from the capacitor region; the interconnect region and the capacitor region having a capacitor foundation surface; the capacitor foundation surface having a serpentine cross-sectional shape on the series of ridges and trenches at the capacitor region; a serpentine, stacked plate capacitor assembly, comprising at least two electrically conductive electrode layers and dielectric layers separating the electrode layers, at the capacitor foundation surface of the capacitor region, the serpentine, stacked plate capacitor assembly creating a stack of one or more capacitors; the interconnect region having landing pads; electrical conductors contacting the landing pads at the interconnect region electrically connected to the electrode layers for access to the electrode layers of the capacitor assembly; and at least an additional one of the ridges or trenches constituting the interconnect region with the landing pads being located as follows; when the additional one is an additional trench, the landing pads are located at the bottom of the additional trench; and when the additional one is an additional ridge, the landing pads are located at the top of the additional ridge.
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11. A capacitor comprising:
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a substrate having a first trench, a capacitor region located within the first trench, and an interconnect region; a series of ridges located within the first trench at the capacitor region, the ridges separated by second trenches; the interconnect region located laterally from the capacitor region; the interconnect region and the capacitor region having a capacitor foundation surface; the capacitor foundation surface having a serpentine cross-sectional shape on the series of ridges and second trenches at the capacitor region within the first trench; a serpentine, stacked plate capacitor assembly, comprising at least two electrically conductive electrode layers and dielectric layers separating the electrode layers, at the capacitor foundation surface of the capacitor region, the serpentine, stacked plate capacitor assembly creating a stack of one or more capacitors; and electrical conductors at the interconnect region electrically connected to the electrode layers for access to the electrode layers of the capacitor assembly.
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Specification