Method for inhibiting oxygen and moisture degradation of a device and the resulting device

• US 9,050,622 B2
• Filed: 03/24/2014
• Issued: 06/09/2015
• Est. Priority Date: 08/18/2005
• Status: Expired due to Fees

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Aitken, Bruce Gardiner, Lewis, Mark Alan, Quesada, Mark Alejandro
• Primary Examiner(s): Breval, Elmito
• Application Number:
  US14/223,380
• Publication Number:
  US 20140234542A1
• Time in Patent Office: 442 Days
• US Class Current: 1/1
• CPC Class Codes: B05D 5/00 Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
• CPC Class Codes: C03C 3/122 containing oxides of As, Sb, Bi, Mo, W, V, Te as glass formers
• CPC Class Codes: C03C 3/14 containing boron
• CPC Class Codes: C03C 3/247 containing fluorine and phosphorus
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 59/873 Encapsulations

Abstract

A method for inhibiting oxygen and moisture degradation of a device and the resulting device are described herein. To inhibit the oxygen and moisture degradation of the device, a low liquidus temperature (LLT) material which typically has a low low liquidus temperature (or in specific embodiments a low glass transition temperature) is used to form a barrier layer on the device. The LLT material can be, for example, tin fluorophosphate glass, chalcogenide glass, tellurite glass and borate glass. The LLT material can be deposited onto the device by, for example, sputtering, evaporation, laser-ablation, spraying, pouring, frit-deposition, vapor-deposition, dip-coating, painting or rolling, spin-coating or any combination thereof. Defects in the LLT material from the deposition step can be removed by a consolidation step (heat treatment), to produce a pore-free, gas and moisture impenetrable protective coating on the device. Although many of the deposition methods are possible with common glasses (i.e. high melting temperature glasses like borate silicate, silica, etc.), the consolidation step is only practical with the LLT material where the consolidation temperature is sufficiently low so as to not damage the inner layers in the device.

Claims

1. A method for sealing a device comprising the steps of:

depositing a starting low liquidus temperature inorganic material over at least a portion of said device; and

heat treating said deposited low liquidus temperature inorganic material that is deposited over said at least a portion of said device in an oxygen and water free environment,

wherein said heat treating step is performed in a vacuum or an inert environment and at a temperature which does not damage components in said device.

2. The method of claim 1, wherein the deposited low liquidus temperature inorganic material and the heat treated low liquidus temperature inorganic material have a higher low liquidus temperature than the starting low liquidus temperature inorganic material.

3. The method of claim 1, wherein the deposited low liquidus temperature inorganic material and the heat treated low liquidus temperature inorganic material have a same low liquidus temperature as the starting low liquidus temperature inorganic material.

4. The method of claim 1, wherein said low liquidus temperature inorganic material is a tin-fluorophosphate material.

5. The method of claim 4, wherein said tin-fluorophosphate material has the following composition:

Sn (20-85 wt %);

P (2-20 wt %);

O (10-36 wt %);

F (10-36 wt %);

Nb (0-5 wt %); and

at least 75% total of Sn+P+O+F.

6. The method of claim 1, wherein said low liquidus temperature inorganic material is one of the following, or any combination thereof:

tin-fluorophosphate material;

chalcogenide material;

tellurite material;

borate material; and

phosphate material.

7. The method of claim 1, wherein said low liquidus temperature inorganic material has a liquidus temperature ≦

1000°

C.

8. The method of claim 1, wherein said low liquidus temperature inorganic material has a liquidus temperature ≦

600°

C.

9. The method of claim 1, wherein said low liquidus temperature inorganic material has a liquidus temperature ≦

400°

C.

10. The method of claim 1, wherein said low liquidus temperature inorganic material is one of the following, or any combination thereof:

chalcogenide material;

tellurite material; and

borate material.

11. The method of claim 1, wherein said low liquidus temperature inorganic material is one of the following, or any combination thereof:

tellurite material; and

borate material.

12. A method for sealing a device comprising the steps of:

depositing a starting low liquidus temperature inorganic material over at least a portion of said device; and

heat treating said deposited low liquidus temperature inorganic material that is deposited over said at least a portion of said device in an oxygen and water free environment,

wherein said heat treating step is performed in a vacuum or an inert environment and at a temperature which does not damage components in said device,

wherein said low liquidus temperature inorganic material is a tin-fluorophosphate material having the following composition;

Sn (20-85 wt %), P (2-20 wt %), O (10-36 wt %), F (10-36 wt %), Nb (0-5 wt %), and at least 75% total of Sn+P+0+F, and

wherein said low liquidus temperature inorganic material has a liquidus temperature ≦

1000°

C.