Method for manufacturing polishing pad

• US 9,050,707 B2
• Filed: 06/14/2013
• Issued: 06/09/2015
• Est. Priority Date: 04/19/2006
• Status: Expired due to Fees

• Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
• Original Assignee: TOYO Tire & Rubber Company Limited
• Inventors: Fukuda, Takeshi, Watanabe, Tsuguo, Hirose, Junji, Nakamura, Kenji, Doura, Masato
• Primary Examiner(s): Tolin, Michael
• Application Number:
  US13/918,341
• Publication Number:
  US 20130340351A1
• Time in Patent Office: 725 Days
• Field of Search: 156/78, 156/269, 264/46.2, 264/46.4, 264/46.5, 264/50, 512/96
• US Class Current: 1/1
• CPC Class Codes: B24B 37/205 provided with a window for inspecting the surface of the work being lapped
• CPC Class Codes: B24B 37/22 characterised by a multi-layered structure
• CPC Class Codes: B24B 37/24 characterised by the composition or properties of the pad materials
• CPC Class Codes: B24B 37/26 characterised by the shape of the lapping pad surface, e.g. grooved
• CPC Class Codes: B24D 11/003 without embedded abrasive particles B24D11/005 takes precedence
• CPC Class Codes: B24D 18/00 Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
• CPC Class Codes: B24D 3/32 for porous or cellular structure
• CPC Class Codes: B29C 44/24 Making multilayered articles
• CPC Class Codes: B29C 44/308 Thickness separators and side seals
• CPC Class Codes: B29C 44/32 Incorporating or moulding on preformed parts, e.g. linings, inserts or reinforcements
• CPC Class Codes: B29C 44/322 the preformed parts being elongated inserts, e.g. cables
• CPC Class Codes: B29C 44/326 Joining the preformed parts, e.g. to make flat or profiled sandwich laminates
• CPC Class Codes: B29C 44/5654 Subdividing foamed articles to obtain particular surface properties, e.g. on multiple modules
• CPC Class Codes: C08J 2375/08 from polyethers
• CPC Class Codes: C08J 9/30 by mixing gases into liquid compositions or plastisols, e.g. frothing with air
• CPC Class Codes: Y10T 156/1052 with cutting, punching, tearing or severing
• CPC Class Codes: Y10T 156/1059 Splitting sheet lamina in plane intermediate of faces

Abstract

A method for manufacturing a polishing pad, which may be laminated, with a small number of manufacturing steps, high productivity and no peeling between a polishing layer and a cushion layer includes preparing a cell-dispersed urethane composition by a mechanical foaming method; continuously discharging the cell-dispersed urethane composition onto a face material, while feeding the face material; laminating another face material on the cell-dispersed urethane composition; curing the cell-dispersed urethane composition, while controlling its thickness to be uniform, so that a polishing layer including a polyurethane foam is formed; cutting the polishing layer parallel to the face into two pieces so that two long polishing layers each including the polishing layer and the face material are simultaneously formed; and cutting the long polishing layers to produce the polishing pad.

Claims

1. A method for manufacturing a laminated polishing pad, comprising the steps of:

preparing a cell-dispersed urethane composition by a mechanical foaming method;

feeding a cushion layer in a feeding direction;

while feeding the cushion layer, feeding in the feeding direction a first spacer on the cushion layer so as to be at one end of a width direction of the cushion layer, feeding in the feeding direction a second spacer on the cushion layer so as to be at other end of the width direction of the cushion layer, and feeding in the feeding direction a third spacer on the cushion layer so as to be between the first and second spacers;

continuously discharging said cell-dispersed urethane composition onto a part of said cushion layer where the spacers are not provided;

laminating a face material on said discharged cell-dispersed urethane composition;

curing the cell-dispersed urethane composition to form a polishing layer comprising a polyurethane foam, while controlling its thickness to be uniform, so that a long laminated sheet is formed; and

cutting the long laminated sheet.

2. The method according to claim 1, wherein one of the spacers comprises a thermoplastic resin or a thermosetting resin.

3. The method according to claim 1, wherein the third spacer is inserted in a through hole of the cushion layer and provided so as to protrude from the cushion layer.

4. The method according to claim 3, wherein the third spacer has a light transmittance of at least 20% over the wavelength range of 400 nm to 700 nm.

5. The method according to claim 1, wherein one of the spacers comprises a polyurethane foam whose composition is the same as that of said cell-dispersed urethane composition.

6. The method according to claim 1, wherein the third spacer is a laminate comprising at least two peelable resin sheets.