Extension-mode angular velocity sensor
First Claim
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1. An angular rate sensor comprising:
- a base;
first, second, third and fourth substantially planar masses disposed substantially in a plane parallel to and above the base, the four substantially planar masses configured to move in an extension mode;
wherein in the extension mode the four substantially planar masses move in the plane simultaneously away from or simultaneously towards a point;
a first Z-axis capacitive sensor coupled to the first mass;
a second Z-axis capacitive sensor coupled to the second mass and configured to move independently of the first mass and the first Z-axis capacitive sensor;
an X-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
a Y-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
wherein,the X-axis capacitive sensor, the Y-axis capacitive sensor, and the first and second Z-axis capacitive sensors are configured to sense angular velocity of the angular rate sensor about three different input axes of the angular rate sensor.
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Abstract
An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.
261 Citations
17 Claims
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1. An angular rate sensor comprising:
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a base; first, second, third and fourth substantially planar masses disposed substantially in a plane parallel to and above the base, the four substantially planar masses configured to move in an extension mode; wherein in the extension mode the four substantially planar masses move in the plane simultaneously away from or simultaneously towards a point; a first Z-axis capacitive sensor coupled to the first mass; a second Z-axis capacitive sensor coupled to the second mass and configured to move independently of the first mass and the first Z-axis capacitive sensor; an X-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses; a Y-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
wherein,the X-axis capacitive sensor, the Y-axis capacitive sensor, and the first and second Z-axis capacitive sensors are configured to sense angular velocity of the angular rate sensor about three different input axes of the angular rate sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An angular rate sensor comprising:
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a base; first, second, third and fourth substantially planar masses disposed substantially in a plane parallel to and above the base, the four substantially planar masses configured to move in an extension mode; wherein each of the four masses has at least one side of rectilinear shape and in the extension mode the four substantially planar masses move in the plane simultaneously away from or simultaneously towards a point; a first Z-axis capacitive sensor coupled to the first mass, situated in the same plane as the first mass and having a plurality of z-electrodes situated substantially parallel to the rectilinear shaped side of the first mass; a second Z-axis capacitive sensor coupled to the second mass and configured to move independently of the first mass and the first Z-axis capacitive sensor; an X-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses; a Y-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
wherein,the X-axis capacitive sensor, the Y-axis capacitive sensor, and the first and second Z-axis capacitive sensors are configured to sense angular velocity of the angular rate sensor about three different input axes of the angular rate sensor. - View Dependent Claims (16)
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17. An angular rate sensor comprising:
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a base; first, second, third and fourth substantially planar masses disposed substantially in a plane parallel to and above the base, the four substantially planar masses configured to move in an extension mode; wherein in the extension mode the four substantially planar masses move in the plane simultaneously away from or simultaneously towards a point; a first Z-axis capacitive sensor coupled to the first mass; a second Z-axis capacitive sensor coupled to the second mass, having a plurality of z-electrodes configured to move in a rectilinear fashion and independently of the first mass and the first Z-axis capacitive sensor in response to a Coriolis force; an X-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses; a Y-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
wherein, the X-axis capacitive sensor, the Y-axis capacitive sensor, and the first and second Z-axis capacitive sensors are configured to sense angular velocity of the angular rate sensor about three different input axes of the angular rate sensor.
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Specification