×

Extension-mode angular velocity sensor

  • US 9,052,194 B2
  • Filed: 08/13/2013
  • Issued: 06/09/2015
  • Est. Priority Date: 09/11/2009
  • Status: Active Grant
First Claim
Patent Images

1. An angular rate sensor comprising:

  • a base;

    first, second, third and fourth substantially planar masses disposed substantially in a plane parallel to and above the base, the four substantially planar masses configured to move in an extension mode;

    wherein in the extension mode the four substantially planar masses move in the plane simultaneously away from or simultaneously towards a point;

    a first Z-axis capacitive sensor coupled to the first mass;

    a second Z-axis capacitive sensor coupled to the second mass and configured to move independently of the first mass and the first Z-axis capacitive sensor;

    an X-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;

    a Y-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;

    wherein,the X-axis capacitive sensor, the Y-axis capacitive sensor, and the first and second Z-axis capacitive sensors are configured to sense angular velocity of the angular rate sensor about three different input axes of the angular rate sensor.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×