Method and system for quadrature error compensation
First Claim
1. A method for compensation of a quadrature error on an MEMS sensor, the method comprising:
- reading out a drive movement using detection electrodes;
detecting a movement of at least one mass arranged on a substrate and mounted to move relative to drive electrodes, the movement deviating from a prescribed movement due to a quadrature error;
identifying a capacitance change as a function of drive movement of the at least one mass using a plurality of compensation electrodes;
generating a compensation charge on the compensation electrodes, the compensation charge being dependent on the quadrature error; and
wherein the quadrature error in the detection electrodes is compensated using the compensation charge without changing a deviating movement of the mass caused by the quadrature error.
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Accused Products
Abstract
Disclosed are a MEMS sensor and methods to compensate a quadrature error on the sensor. The sensor detects movements of a substrate, especially accelerations and rotation rates. At least one mass arranged on the substrate and mounted to move relative to it is driven by drive electrodes. The mass executes a movement deviating from the prescribed movement due to a quadrature error. A deflection of the mass occurring due to Coriolis force and quadrature error is detected with detection electrodes. A capacitance change is detected as a function of drive movement of the mass by using compensation electrodes. A compensation charge dependent on the quadrature error of the MEMS sensor is generated on the compensation electrodes. For compensation, the distorted or incorrect charge generated by the quadrature error in the detection electrodes is compensated with the compensation charge.
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Citations
13 Claims
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1. A method for compensation of a quadrature error on an MEMS sensor, the method comprising:
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reading out a drive movement using detection electrodes; detecting a movement of at least one mass arranged on a substrate and mounted to move relative to drive electrodes, the movement deviating from a prescribed movement due to a quadrature error; identifying a capacitance change as a function of drive movement of the at least one mass using a plurality of compensation electrodes; generating a compensation charge on the compensation electrodes, the compensation charge being dependent on the quadrature error; and wherein the quadrature error in the detection electrodes is compensated using the compensation charge without changing a deviating movement of the mass caused by the quadrature error. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A MEMS sensor for detection of movements of a substrate the sensor comprising:
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a substrate; at least one mass arranged on the substrate and mounted to move relative to a movement of the substrate and driven by drive electrodes; at least one detection electrode arranged on the substrate, the at least one detection electrode detecting a deflection of the at least one mass due to a Coriolis force and a quadrature error; at least one compensation electrode arranged on the substrate to record a capacitance change as a function of a drive movement of the at least one mass; and a voltage source, which applies a predetermined voltage dependent on the quadrature error to the at least one compensation electrode to generate a compensation charge that is used to compensate for at least a portion of the quadrature error. - View Dependent Claims (11, 12, 13)
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Specification