Actuator inside of motion control
First Claim
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1. A device, comprising:
- a generally planar outer frame;
a platform;
a motion control mechanism adapted to permit movement of the platform in a plurality of directions relative to the outer frame; and
an actuator contained at least partially within the motion control mechanism and operable to move the platform in a plurality of directions relative to the outer frame, including with translational movement in a direction substantially perpendicular to a plane defined by the outer frame, wherein the actuator comprises a movable frame, and wherein the motion control mechanism comprises a plurality of flexures configured to cooperate to provide a lateral stiffness and a rotational stiffness between the outer frame and the moveable frame and wherein the lateral stiffness is comparatively higher than the rotational stiffness.
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Abstract
A device can comprise an outer frame, a platform, and a motion control mechanism. The motion control mechanism can be adapted to permit movement of the platform in a desired direction with respect to the outer frame and inhibit rotation of the platform with respect to the outer frame. An actuator can be contained at least partially within the motion control mechanism.
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Citations
22 Claims
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1. A device, comprising:
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a generally planar outer frame; a platform; a motion control mechanism adapted to permit movement of the platform in a plurality of directions relative to the outer frame; and an actuator contained at least partially within the motion control mechanism and operable to move the platform in a plurality of directions relative to the outer frame, including with translational movement in a direction substantially perpendicular to a plane defined by the outer frame, wherein the actuator comprises a movable frame, and wherein the motion control mechanism comprises a plurality of flexures configured to cooperate to provide a lateral stiffness and a rotational stiffness between the outer frame and the moveable frame and wherein the lateral stiffness is comparatively higher than the rotational stiffness. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method, comprising:
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forming a generally planar outer frame; forming a platform; forming a motion control mechanism adapted to permit movement of the platform in a plurality of directions relative to the outer frame; and forming an actuator at least partially within the motion control mechanism, the actuator being operable move the platform in a plurality of directions relative to the outer frame, including with translational movement in a direction substantially perpendicular to a plane defined by the outer frame, wherein the actuator comprises a movable frame, and wherein the motion control mechanism comprises a plurality of flexures configured to cooperate to provide a lateral stiffness and a rotational stiffness between the outer frame and the moveable frame and wherein the lateral stiffness is comparatively higher than the rotational stiffness. - View Dependent Claims (17, 18)
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19. A method, comprising:
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permitting movement of a platform in a plurality of directions relative to a generally planar outer frame; moving the platform with translational movement in a direction substantially perpendicular to a plane defined by the outer frame with an actuator contained at least partially within a motion control mechanism; bending a cantilever flexure in one direction to accommodate a varying angle between a movable frame of an actuator and the platform; and bending the cantilever flexure in a different direction to accommodate a varying distance between the movable frame of the actuator and the platform. - View Dependent Claims (20, 21, 22)
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Specification