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Actuator inside of motion control

  • US 9,052,567 B2
  • Filed: 11/15/2010
  • Issued: 06/09/2015
  • Est. Priority Date: 11/15/2010
  • Status: Active Grant
First Claim
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1. A device, comprising:

  • a generally planar outer frame;

    a platform;

    a motion control mechanism adapted to permit movement of the platform in a plurality of directions relative to the outer frame; and

    an actuator contained at least partially within the motion control mechanism and operable to move the platform in a plurality of directions relative to the outer frame, including with translational movement in a direction substantially perpendicular to a plane defined by the outer frame, wherein the actuator comprises a movable frame, and wherein the motion control mechanism comprises a plurality of flexures configured to cooperate to provide a lateral stiffness and a rotational stiffness between the outer frame and the moveable frame and wherein the lateral stiffness is comparatively higher than the rotational stiffness.

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