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Charged-particle radiation apparatus

  • US 9,053,902 B2
  • Filed: 11/12/2012
  • Issued: 06/09/2015
  • Est. Priority Date: 11/25/2011
  • Status: Active Grant
First Claim
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1. A charged particle radiation apparatus provided with an X-ray detector,wherein a first back scattered electron detector is disposed at a tip portion of the X-ray detector and on the same axis as an X-ray detection surface of the X-ray detector, and disposed integrally with or independently from the X-ray detector, andwherein the charged-particle radiation apparatus has a function of detecting, simultaneously with or separately from each other, an X-ray signal by the X-ray detector and a back scattered electron signal by the first back scattered electron detector.

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