Charged-particle radiation apparatus

• US 9,053,902 B2
• Filed: 11/12/2012
• Issued: 06/09/2015
• Est. Priority Date: 11/25/2011
• Status: Active Grant

• Current Assignee: Toto Limited
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.), Toto Limited
• Inventors: Ebine, Yuta, Tomita, Shinichi, Ito, Sukehiro, Aoshima, Toshihiro
• Primary Examiner(s): IPPOLITO, NICOLE MARIE
• Application Number:
  US14/356,191
• Publication Number:
  US 20140284477A1
• Time in Patent Office: 939 Days
• Field of Search: 250/396.R, 250/397, 250/305, 250/306, 250/307, 250/309, 250/310, 250/311, 250/492.1, 250/492.2, 250/492.3
• US Class Current: 1/1
• CPC Class Codes: H01J 2237/221 Image processing
• CPC Class Codes: H01J 2237/24415 X-ray
• CPC Class Codes: H01J 2237/24475 Scattered electron detectors
• CPC Class Codes: H01J 37/023 Means for mechanically adjusting components not otherwise provided for
• CPC Class Codes: H01J 37/244 Detectors; Associated components or circuits therefor
• CPC Class Codes: H01J 37/252 Tubes for spot-analysing by electron or ion beams; Microanalysers
• CPC Class Codes: H01J 37/261 Details
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

In order to provide a charged-particle radiation apparatus capable of evaluating and distinguishing the analysis position in a sample subjected to X-ray analysis in the stage before performing X-ray elemental analysis, and also making it possible for an analyst to perform, in a short period of time and without reworking, analysis for which high reliability is ensured, the present invention provides a charged-particle radiation apparatus provided with an X-ray detector, wherein a first back scattered electron detector (15) on the same axis as the X-ray detection surface of the X-ray detector (12 (25-30)) is disposed integrally with or independently from the X-ray detector (12), an X-ray signal being detected by the X-ray detector (12) simultaneously with or separately from detection of a back scattered electron signal by the first back scattered electron detector (15).

Claims

1. A charged particle radiation apparatus provided with an X-ray detector,

wherein a first back scattered electron detector is disposed at a tip portion of the X-ray detector and on the same axis as an X-ray detection surface of the X-ray detector, and disposed integrally with or independently from the X-ray detector, and

wherein the charged-particle radiation apparatus has a function of detecting, simultaneously with or separately from each other, an X-ray signal by the X-ray detector and a back scattered electron signal by the first back scattered electron detector.

2. The charged-particle radiation apparatus according to claim 1 having a function of analyzing an amount of back scattered electron signals in every pixel in a first back scattered electron image acquired by the first back scattered electron detector by using the first back scattered electron image such that an efficiency of detecting an X-ray in an observation range by the charged-particle radiation apparatus is at least evaluated or distinguished.

3. The charged-particle radiation apparatus according to claim 2 further comprising a second back scattered electron detector on an optical axis of primary charged-particle radiation, and also having a function of displaying the efficiency of detecting an X-ray in the observation range or a result of distinguishing the efficiency by superimposing it on a second back scattered electron image acquired by the second back scattered electron detector.

4. The charged-particle radiation apparatus according to claim 2 further comprising a secondary electron detector, and also having a function of displaying the efficiency of detecting an X-ray in the observation range or a result of distinguishing the efficiency by superimposing it on a secondary electron image acquired by the secondary electron detector.

5. The charged-particle radiation apparatus according to claim 2 having a function of displaying in dialog whether the observation range can be subjected to X-ray elemental analysis.

6. The charged-particle radiation apparatus according to claim 1 further comprising a second back scattered electron detector on an optical axis of primary charged-particle radiation, and also having a function of performing image processing analysis by using a second back scattered electron image obtained by the second back scattered electron detector and the first back scattered electron image obtained by the first back scattered electron detector such that an efficiency of detecting an X-ray in an observation range by the charged-particle radiation apparatus is at least evaluated or distinguished.

7. The charged-particle radiation apparatus according to claim 6 having a function of displaying the efficiency of detecting an X-ray in the observation range or a result of distinguishing the efficiency by superimposing it on the second back scattered electron image.

8. The charged-particle radiation apparatus according to claim 6 further comprising a secondary electron detector, and also having a function of displaying the efficiency of detecting an X-ray in the observation range or a result of distinguishing the efficiency by superimposing it on a secondary electron image acquired by the secondary electron detector.

9. The charged-particle radiation apparatus according to claim 6 having a function of displaying in dialog whether the observation range can be subjected to X-ray elemental analysis.

10. A charged particle radiation apparatus provided with an X-ray detector,

wherein a first back scattered electron detector is disposed at a tip portion of the X-ray detector and at a position non-coaxial with an X-ray detection surface of the X-ray detector, and disposed integrally with or independently from the X-ray detector, and

wherein the charged-particle radiation apparatus has a function of detecting, simultaneously with or separately from each other, an X-ray signal by the X-ray detector and a back scattered electron signal by the first back scattered electron detector.

11. The charged-particle radiation apparatus according to claim 10 having a function of analyzing an amount of back scattered electron signals in every pixel in the first back scattered electron image acquired by the first back scattered electron detector by using the first back scattered electron image such that an efficiency of detecting an X-ray in an observation range by the charged-particle radiation apparatus is at least evaluated or distinguished.

12. The charged-particle radiation apparatus according to claim 11 further comprising a secondary electron detector on an optical axis of primary charged-particle radiation, and also having a function of displaying the efficiency of detecting an X-ray in the observation range or a result of distinguishing the efficiency by superimposing it on a second back scattered electron image acquired by the second back scattered electron detector.

13. The charged-particle radiation apparatus according to claim 11 further comprising a secondary electron detector, and also having a function of displaying the efficiency of detecting an X-ray in the observation range or a result of distinguishing the efficiency by superimposing it on a secondary electron image acquired by the secondary electron detector.

14. The charged-particle radiation apparatus according to claim 11 having a function of displaying in dialog whether the observation range can be subjected to X-ray elemental analysis.

15. The charged-particle radiation apparatus according to claim 10 further comprising a second back scattered electron detector on an optical axis of primary charged-particle radiation, and also having a function of performing image processing analysis by using a second back scattered electron image obtained by the second back scattered electron detector and the first back scattered electron image obtained by the first back scattered electron detector such that an efficiency of detecting an X-ray in an observation range by the charged-particle radiation apparatus is at least evaluated or distinguished.

16. The charged-particle radiation apparatus according to claim 15 having a function of displaying the efficiency of detecting an X-ray in the observation range or a result of distinguishing the efficiency by superimposing it on the second back scattered electron image.

17. The charged-particle radiation apparatus according to claim 15 further comprising a secondary electron detector, and also having a function of displaying the efficiency of detecting an X-ray in the observation range or a result of distinguishing the efficiency by superimposing it on a secondary electron image acquired by the secondary electron detector.

18. The charged-particle radiation apparatus according to claim 15 having a function of displaying in dialog whether the observation range can be subjected to X-ray elemental analysis.