Charged-particle radiation apparatus
First Claim
1. A charged particle radiation apparatus provided with an X-ray detector,wherein a first back scattered electron detector is disposed at a tip portion of the X-ray detector and on the same axis as an X-ray detection surface of the X-ray detector, and disposed integrally with or independently from the X-ray detector, andwherein the charged-particle radiation apparatus has a function of detecting, simultaneously with or separately from each other, an X-ray signal by the X-ray detector and a back scattered electron signal by the first back scattered electron detector.
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Abstract
In order to provide a charged-particle radiation apparatus capable of evaluating and distinguishing the analysis position in a sample subjected to X-ray analysis in the stage before performing X-ray elemental analysis, and also making it possible for an analyst to perform, in a short period of time and without reworking, analysis for which high reliability is ensured, the present invention provides a charged-particle radiation apparatus provided with an X-ray detector, wherein a first back scattered electron detector (15) on the same axis as the X-ray detection surface of the X-ray detector (12 (25-30)) is disposed integrally with or independently from the X-ray detector (12), an X-ray signal being detected by the X-ray detector (12) simultaneously with or separately from detection of a back scattered electron signal by the first back scattered electron detector (15).
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Citations
18 Claims
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1. A charged particle radiation apparatus provided with an X-ray detector,
wherein a first back scattered electron detector is disposed at a tip portion of the X-ray detector and on the same axis as an X-ray detection surface of the X-ray detector, and disposed integrally with or independently from the X-ray detector, and wherein the charged-particle radiation apparatus has a function of detecting, simultaneously with or separately from each other, an X-ray signal by the X-ray detector and a back scattered electron signal by the first back scattered electron detector.
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10. A charged particle radiation apparatus provided with an X-ray detector,
wherein a first back scattered electron detector is disposed at a tip portion of the X-ray detector and at a position non-coaxial with an X-ray detection surface of the X-ray detector, and disposed integrally with or independently from the X-ray detector, and wherein the charged-particle radiation apparatus has a function of detecting, simultaneously with or separately from each other, an X-ray signal by the X-ray detector and a back scattered electron signal by the first back scattered electron detector.
Specification