Data collection system for vacuum processing apparatus

• US 9,054,142 B2
• Filed: 06/21/2011
• Issued: 06/09/2015
• Est. Priority Date: 12/24/2008
• Status: Active Grant

• Current Assignee: Canon Anelva Corporation (Canon Inc.)
• Original Assignee: Canon Anelva Corporation (Canon Inc.)
• Inventors: Zhen, Yugui, Sumitani, Toshiaki, Azuma, Yoshinori, Katsumata, Kiyohisa
• Primary Examiner(s): DUNN, DARRIN D
• Application Number:
  US13/165,656
• Publication Number:
  US 20110313562A1
• Time in Patent Office: 1,449 Days
• Field of Search: 700/108, 700/117, 700/121, 700/217, 700/247, 700/250, 702/81, 702/182, 702/187, 370/242, 370/412, 340/539.12
• US Class Current: 1/1
• CPC Class Codes: G05B 19/41835 characterised by programme execution
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A control device of a transfer module and a process module in a vacuum processing apparatus collects state data from the modules. The control device has a state data set including data on the entire module, updates its own state data in the set of its own state data acquired at acquisition timing and transmits it to a data collection device at transmission timing. A plurality of control devices is connected in a loop or in a chain to the data collection device; a data transmission interval is shorter than a data collection interval, and entire transmission synchronization is set to be less than twice an interval of acquisition timing.

Claims

1. A vacuum processing apparatus comprising:

a transfer module that transfers an object to be processed;

a transfer module control device that repeatedly acquires state data of the transfer module at first intervals and stores the acquired state data of the transfer module therein;

a process module that is connected to the transfer module and performs processing on the object to be processed which is transferred from the transfer module;

a process module control device that repeatedly acquires state data of the process module at second intervals and stores the acquired state data of the process module therein; and

a data collection device that collects the state data of the transfer module and the state data of the process module,

wherein the transfer module control device, the process module control device and the data collection device are connected in a loop and are configured such that a state data set including the state data of the transfer module and the state data of the process module can be transmitted and received between each other,

wherein the data collection device is configured to receive the state data set from one of the transfer module control device and the process module control device and transmit the received state data set to the other one of the transfer module control device and the process module control device, and

where the other one of the transfer module control device and the process module control device is configured to receive the state data set from the data collection device to replace, in response to timing of reception of the state data set, only its own state data portion in the received state data set with the latest state data stored therein to create an updated state data set including the latest state data and the state data of the one of the transfer module control device and the process module control device in the received state data set as it is, and to transmit the updated state data set to the one of the transfer module control device and the process module control device.

2. The vacuum processing apparatus of claim 1, wherein a transmission period of the state data set of each of the data collection device, process module control device and the transfer module control device is set such that an arrival time until the state data portion updated in the process module control device and the transfer module control device arrives at the data collection device is less than twice a data collection interval in the process module control device and the transfer module control device.

3. The vacuum processing apparatus of claim 1, wherein the process module control device and the transfer module control device are configured such that processing for acquiring their respective state data and processing for transmitting their respective data including their respective state data can be performed concurrently.

4. The vacuum processing apparatus of claim 1, further comprising a history storage device that stores a history of state data acquired by the data collection device.

5. The vacuum processing apparatus of claim 1, wherein the transfer module comprises:

a first sub-module that supplies, by a transfer robot, the object to be processed to the process module; and

a second sub-module that supplies the object to be processed to the transfer robot, and wherein

the transfer module control device is provided commonly for both the first and second sub-modules.

6. The vacuum processing apparatus of claim 1, wherein the one of the transfer module control device an the process module control device is configured to receive the state data set from the other one of the transfer module control device and the process module control device, to replace, in response to timing of reception of the state data set, only its own state data in the received data set with the latest state data stored therein to create an updated state data set including the latest state data and the state data of the other one of the transfer module control device and the process module control device in the received state data set as it is, and to transmit the updated state data set to the data collection device.