Interdigitated back contact silicon solar cells fabrication using diffusion barriers

• US 9,054,237 B2
• Filed: 11/24/2010
• Issued: 06/09/2015
• Est. Priority Date: 09/09/2008
• Status: Active Grant

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Inventors: Nakayashiki, Kenta, Xu, Baomin
• Primary Examiner(s): GARDNER, SHANNON M
• Application Number:
  US12/954,299
• Publication Number:
  US 20110070676A1
• Time in Patent Office: 1,658 Days
• Field of Search: 136/243, 136/244
• US Class Current: 1/1
• CPC Class Codes: H01L 31/022425 for solar cells
• CPC Class Codes: H01L 31/022441 Electrode arrangements specially adapted for back-contact solar cells
• CPC Class Codes: H01L 31/0682 back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
• CPC Class Codes: H01L 31/1804 comprising only elements of Group IV of the Periodic Table
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

Interdigitated back contact (IBC) solar cells are produced by depositing spaced-apart parallel pads of a first dopant bearing material (e.g., boron) on a substrate, heating the substrate to both diffuse the first dopant into corresponding first (e.g., p+) diffusion regions and to form diffusion barriers (e.g., borosilicate glass) over the first diffusion regions, and then disposing the substrate in an atmosphere containing a second dopant (e.g., phosphorus) such that the second dopant diffuses through exposed surface areas of the substrate to form second (e.g., n+) diffusion regions between the first (p+) diffusion regions (the diffusion barriers prevent the second dopant from diffusion into the first (p+) diffusion regions). The substrate material along each interface between adjacent first (p+) and second (n+) diffusion regions is then removed (e.g., using laser ablation) such that elongated grooves, which extend deeper into the substrate than the diffused dopant, are formed between adjacent diffusion regions.

Claims

1. A method of fabricating an interdigitated back contact solar cell, the method comprising:

diffusing a first dopant into first and second substrate regions through a planar rear surface of a semiconductor substrate such that the first dopant forms first and second spaced-apart diffusion regions in said first and second substrate regions having a first doping concentration and extending a first depth into the substrate from the planar rear surface, and are separated by a third substrate region having a second doping concentration and extending a second depth into the substrate from the planar rear surface, wherein diffusing the first dopant includes;

depositing spaced-apart pads of material containing boron onto the planar rear surface of substrate over said first and second substrate regions; and

heating the substrate such that a first portion of the boron diffuses into said first and second substrate regions through said planar rear surface to form said first and second diffusion regions, and such that a second portion of the boron forms spaced-apart first and second borosilicate glass structures on said planar rear surface over said first and second diffusion regions; and

after forming said spaced-apart first and second borosilicate glass structures, diffusing a second dopant into said third substrate region through said planar rear surface of said semiconductor substrate such that said second dopant passes between said spaced-apart first and second borosilicate glass structures and forms a third diffusion region in said third substrate region, and such that said second dopant disposed in the third diffusion region forms a first interface with the first dopant disposed in the first diffusion region and a second interface with the first dopant disposed in the second diffusion region, wherein said first and second spaced-apart borosilicate glass structures form effective barriers that prevent diffusion of said second dopant into said first and second substrate regions during said diffusing of said second dopant.

2. The method according to claim 1, further comprising, after forming said first and second borosilicate glass structures, disposing said substrate in a furnace containing POCl₃ at a temperature selected such that phosphorus is diffused into said third substrate region and said first and second borosilicate glass structures prevents diffusion of said n-type dopant into said first and second substrate regions.

3. The method according to claim 1, further comprising forming a plurality of grooves into the planar rear surface of the substrate such that the first diffusion region is separated from the third diffusion region by a first groove, and the second diffusion region is separated from the third diffusion region by a second groove.

4. A method of fabricating an interdigitated back contact solar cell, the method comprising:

depositing spaced-apart first and second pads of a material containing boron onto the planar rear surface of a semiconductor substrate over first and second substrate regions, respectively;

heating the substrate such that a first portion of the boron diffuses from the first and second pads into said first and second substrate regions, respectively, through said planar rear surface to form first and second diffusion regions, and a second portion of the boron forming the first and second pads is converted into first and second borosilicate glass diffusion barrier structures, respectively, that are formed on said planar rear surface over said first and second diffusion regions during said heating, and

after said spaced-apart first and second borosilicate glass diffusion barrier structures are formed, diffusing a second dopant into a third substrate region through the planar rear surface of the semiconductor substrate between said first and second borosilicate glass diffusion barrier structures to form a third diffusion region such that said second dopant disposed in the third diffusion region forms a first interface with the first dopant disposed in the first diffusion region and a second interface with the first dopant disposed in the second diffusion region,

wherein said first and second borosilicate glass diffusion barrier structures are formed prior to said second dopant diffusion such that said first and second borosilicate glass diffusion barrier structures prevent diffusion of said second dopant into said first and second substrate regions during said second dopant diffusion.

5. The method according to claim 4, wherein diffusing the second dopant comprises, after forming said first and second borosilicate glass diffusion barrier structures, disposing said substrate in a furnace containing POCl₃ at a temperature selected such that phosphorus is diffused into said third substrate region.

6. The method according to claim 4, further comprising forming a plurality of grooves into the planar rear surface of the substrate such that the first diffusion region is separated from the third diffusion region by a first groove, and the second diffusion region is separated from the third diffusion region by a second groove.

7. A method of fabricating an interdigitated back contact solar cell, the method comprising:

depositing spaced-apart pads of a material containing boron onto a planar rear surface of a semiconductor substrate over first and second substrate regions;

heating the substrate such that a first portion of the boron diffuses into said first and second substrate regions through said planar rear surface to form first and second diffusion regions, and such that a second portion of the boron forms first and second borosilicate glass structures on said planar rear surface over said first and second diffusion regions, and

after said first and second borosilicate glass structures are formed, diffusing a second dopant through the planar rear surface of the semiconductor substrate into a third substrate region to form a third diffusion region such that said second dopant disposed in the third diffusion region forms a first interface with the first dopant disposed in the first diffusion region and a second interface with the first dopant disposed in the second diffusion region,

wherein said heating is performed such that said first and second borosilicate glass structures form effective barriers that prevent diffusion of said second dopant into said first and second substrate regions during said second dopant diffusion.

8. The method according to claim 7, wherein diffusing said second dopant comprises disposing said substrate in a furnace containing POCl₃ at a temperature selected such that phosphorus is diffused into said third substrate region and said glass structures prevent diffusion of Phosphorous from said POCl₃ into said first and second substrate regions.

9. The method according to claim 7, further comprising forming a plurality of grooves into the planar rear surface of the substrate such that the first diffusion region is separated from the third diffusion region by a first groove, and the second diffusion region is separated from the third diffusion region by a second groove.