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Two degree of freedom dithering platform for MEMS sensor calibration

  • US 9,061,891 B2
  • Filed: 10/07/2014
  • Issued: 06/23/2015
  • Est. Priority Date: 04/27/2011
  • Status: Active Grant
First Claim
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1. A method for fabricating a micro-electromechanical system (MEMS) sensing device, the method comprising:

  • forming a MEMS sensor layer, the MEMS sensor layer comprising;

    a MEMS sensor; and

    an in-plane rotator configured to rotate the MEMS sensor in the plane of the MEMS sensor layer;

    forming a first rotor layer and a second rotor layer;

    bonding the first rotor layer to a top surface of the MEMS sensor layer and bonding the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first rotor portion of the first rotor layer and a second rotor portion of the second rotor layer connect to the MEMS sensor; and

    separating the first rotor portion from the first rotor layer and the second rotor portion from the second rotor layer, wherein the first rotor portion, MEMS sensor, and second rotor portion rotate about an axis in the plane of the MEMS sensor layer.

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