Wavelength scanning interferometer and method for aspheric surface measurement

• US 9,062,959 B2
• Filed: 04/04/2014
• Issued: 06/23/2015
• Est. Priority Date: 03/15/2012
• Status: Active Grant

• Current Assignee: Zhejiang University
• Original Assignee: Zhejiang University
• Inventors: Bai, Jian, Shen, Yibing, Yang, Yongying, Wang, Kaiwei
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): RAHMAN, MD M
• Application Number:
  US14/245,996
• Publication Number:
  US 20140218750A1
• Time in Patent Office: 445 Days
• Field of Search: 356/512
• US Class Current: 1/1
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01B 9/02039 by matching the wavefront with a particular object surface shape
• CPC Class Codes: G01B 9/02041 characterised by particular imaging or detection techniques
• CPC Class Codes: G01M 11/005 Testing of reflective surfaces, e.g. mirrors

Abstract

The present invention discloses a wavelength scanning interferometer and a method for an aspheric surface measurement. The wavelength scanning interferometer comprises a set of tunable lasers (7) used as a light source, a Twyman-Green interferometer used for generating interference fringes, a translation platform (1) used for scanning an optical path difference along an optical axis, an image card (11) used for converting interference data to a digital signal and transmitting the digital signal to a computer (12), and a data card (13) used for synchronizing the actions of a CCD camera (9) and the translation platform (1). Different from the traditional aspheric surface measurement method, the interferometer is capable of measuring a surface with a high aspheric surface degree or a wavefront, and without the need of a zero compensation mirror. In addition, the method does not need a complex and usually expensive multi-dimensional movement platform.

Claims

1. A wavelength scanning interferometer for an aspheric surface measurement, characterized by, comprising a translation platform (1), a measured aspheric surface (2), a first mirror group (3), a light splitter (4), a beam expander (6), a tunable laser (7), an imaging lens (8), a CCD camera (9), a reference plane mirror (10), an image card (11), a computer (12) and a data card (13), wherein the measured aspheric surface (2) is fixed on the translation platform (1), the measured aspheric surface (2), the first mirror group (3), the light splitter (4), the imaging lens (8) and the CCD camera (9) are coaxially placed in sequence, the reference plane mirror (10) is arranged at the bottom of the light splitter (4), the CCD camera (9), the image card (11), the computer (12) and the data card (13) are connected in sequence, the beam expander (6) is connected with the tunable laser (7), and the translation platform (1) and the tunable laser (7) are connected with the data card (13) respectively;

a light beam emitted by the tunable laser (7) is expanded by the beam expander (6) to become a parallel light beam with wavefront divided into two beams by the light splitter (4), one beam is incident on the reference plane mirror (10) to become a reference light, and the other beam is focused by the first mirror group (3) and then is incident on the measured aspheric surface (2), the lights reflected by the reference mirror (10) and the measured aspheric surface (2) are re-superposed on the light splitter (4) to form interference;

interference fringes are acquired by the CCD camera (9) after passing through the imaging lens (8), and encounter optical-electric conversion in the CCD camera (9) and then analogue-digital conversion in the image card (11), and finally enter into the computer (12) which performs signal processing so as to obtain an optical path difference and surface shape information;

wherein, when in use, wavelengths of a light source are scanned and interference fringes are recorded, so as to calculate an absolute optical path difference of a cat eye position, which is recorded as OPDc, and calculate an absolute optical path difference of a vertex sphere position, which is recorded as OPDa;

then distance d between the vertex sphere position and the cat eye position is a curvature radius of the vertex sphere of the measured surface;

R0=OPDa−

OPDc.

2. The wavelength scanning interferometer for the aspheric surface measurement of claim 1, characterized by, further comprising a plane mirror (5), wherein the plane mirror (5) is used for reflecting the parallel light beam expanded by the beam expander (6) to the light splitter (4).

3. A method for the measurement of an aspheric surface by applying the wavelength scanning interferometer of claim 1, characterized by, comprising the following steps:

step 1, setting a cat eye position, specifically, adjusting a vertex of the measured aspheric surface to a position superposing with a focus of a measurement light beam of the interferometer, the position Oc is called as a cat eye position, and a superposition criterion is that the interference fringes are fewest;

step 2, scanning a wavelength of a light source, and recording the interference fringes simultaneously to calculate an absolute optical path difference of the cat eye position which is recorded as OPDc;

step 3, moving the measured aspheric surface to a vertex sphere position by the translation table, at the moment, a wave surface of the measurement light beam is superposed with the vertex sphere of the aspheric surface;

step 4, scanning the wavelength of the light source and recording the interference fringes simultaneously to calculate an absolute optical path difference of the vertex position which is recorded as OPDa;

then distance d between the vertex sphere position and the cat eye position in step 1 is a curvature radius of the vertex sphere of the measured surface;

R0=OPDa−

OPDc;

step 5, stepwise moving the aspheric surface by the translation platform, scanning the wavelength of the light source and recording the interference fringes simultaneously in every step to calculate an absolute optical path difference of each point until whole aperture of the aspheric surface is covered, with the movement of the measured aspheric surface, the distance d between the vertex sphere position and the cat eye position gradually increases, a tangential point of measurement wavefront and the measured aspheric surface is sequentially expanded outwards from the vertex position of the aspheric surface until all apertures of the aspheric surface are completely measured;

step 6, integrating measurement results in steps 1-5 to obtain the surface shape information of the aspheric surface.

4. A method for the measurement of an aspheric surface by applying the wavelength scanning interferometer of claim 2, characterized by, comprising the following steps:

step 1, setting a cat eye position, specifically, adjusting a vertex of the measured aspheric surface to a position superposing with a focus of a measurement light beam of the interferometer, the position Oc is called as a cat eye position, and a superposition criterion is that the interference fringes are fewest;

step 2, scanning a wavelength of a light source, and recording the interference fringes simultaneously to calculate an absolute optical path difference of the cat eye position which is recorded as OPDc;

step 3, moving the measured aspheric surface to a vertex sphere position by the translation table, at the moment, a wave surface of the measurement light beam is superposed with the vertex sphere of the aspheric surface;

step 4, scanning the wavelength of the light source and recording the interference fringes simultaneously to calculate an absolute optical path difference of the vertex position which is recorded as OPDa;

then distance d between the vertex sphere position and the cat eye position in step 1 is a curvature radius of the vertex sphere of the measured surface;

R0=OPDa−

OPDc;

step 5, stepwise moving the aspheric surface by the translation platform, scanning the wavelength of the light source and recording the interference fringes simultaneously in every step to calculate an absolute optical path difference of each point until whole aperture of the aspheric surface is covered, with the movement of the measured aspheric surface, the distance d between the vertex sphere position and the cat eye position gradually increases, a tangential point of measurement wavefront and the measured aspheric surface is sequentially expanded outwards from the vertex position of the aspheric surface until all apertures of the aspheric surface are completely measured;

step 6, integrating measurement results in steps 1-5 to obtain the surface shape information of the aspheric surface.