Nanoindenter

• US 9,063,042 B2
• Filed: 06/12/2012
• Issued: 06/23/2015
• Est. Priority Date: 03/13/2006
• Status: Active Grant

• Current Assignee: Oxford Instruments Afm Inc
• Original Assignee: Oxford Instruments Afm Inc, Oxford Instruments PLC
• Inventors: Bonilla, Flavio Alejandro, Proksch, Roger, Cleveland, Jason, Sauter, Tim
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US13/494,526
• Publication Number:
  US 20120272411A1
• Time in Patent Office: 1,106 Days
• Field of Search: 73/71, 73/81, 73/82, 731/05, 850/1, 850/5, 850/6, 850/21, 850/22, 850/33, 850/40, 850/52, 850/56, 850/62, 850/63, 977/863, 977/868, 977/875
• US Class Current: 1/1
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01N 2203/0078 using indentation
• CPC Class Codes: G01N 3/317 generated by electromagnetic means
• CPC Class Codes: G01Q 60/366 Nanoindenters, i.e. wherein the indenting force is measured

Abstract

A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.

Claims

1. An assembly, comprising:

a measuring instrument which includes a connection to a measuring part, an actuator for said measuring part, and sensors for measuring displacement and force of said measuring part, where said measuring part is adapted to connect to an optical lever that has a lever that moves at a non-perpendicular angle relative to a sample being measured; and

an indenter portion, including an indenter probe, said indenter portion being movable to move perpendicularly relative to the sample being measured, and connects to said connection and uses the same actuator and sensors as said measuring part, wherein said indenter portion includes a three-dimensional flexure through which the indenter probe is moved by said actuator in a Z axis direction, which is a direction perpendicular to a plane of the flexure and perpendicular to the sample being measured.

2. An assembly as in claim 1, wherein said measuring instrument is an atomic force microscope.

3. An assembly, comprising:

a measuring instrument which includes a connection to a cantilever, an actuator for said cantilever, and sensors for measuring displacement and force of said cantilever; and

an indenter portion, including an indenter probe, said indenter portion being movable to move perpendicularly relative to a sample being measured, wherein said indenter probe uses the same actuator and sensors as said instrument, and wherein said indenter portion includes a three-dimensional flexure through which the indenter probe is moved by said actuator in a Z axis direction, which is a direction perpendicular to a plane of the flexure and perpendicular to the sample, wherein said assembly further comprising a cover which constrains movement of said flexure beyond a specified amount.

4. An assembly as in claim 3 wherein said cover includes hard stops that prevent extending the flexure in said Z axis direction by more than a specified amount.

5. An assembly, comprising:

a measuring instrument which includes a connection to a cantilever, an actuator for said cantilever, and sensors for measuring displacement and force of said cantilever; and

an indenter portion, including an indenter probe, said indenter portion being movable to move perpendicularly relative to a sample being measured, wherein said indenter probe uses the same actuator and sensors as said instrument, and wherein said indenter portion includes a three-dimensional flexure through which the indenter probe is moved by said actuator in a Z axis direction, which is a direction perpendicular to a plane of the flexure and perpendicular to the sample, wherein said flexure has first, second and third portions which constrain the flexure against movement in directions other than said Z axis direction and a flexing portion at a center portion thereof.

6. An assembly as in claim 5, wherein said flexure is a three-dimensional leaf spring having three supporting portions at outer edges thereof.

7. An assembly, comprising:

a measuring instrument which includes a connection to a cantilever, an actuator for said cantilever, and sensors for measuring displacement and force of said cantilever; and

an indenter portion, including an indenter probe, said indenter portion being movable to move perpendicularly relative to a sample being measured, wherein said indenter probe uses the same actuator and sensors as said instrument, and wherein said indenter portion includes a three-dimensional flexure through which the indenter probe is moved by said actuator in a Z axis direction, which is a direction perpendicular to a plane of the flexure and perpendicular to the sample, wherein said assembly further comprising a structure that converts linear motion of the indenter probe into angular motion of a type that is monitored by sensors of the cantilever.