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Miniature MEMS actuator assemblies

  • US 9,063,278 B2
  • Filed: 11/17/2014
  • Issued: 06/23/2015
  • Est. Priority Date: 11/15/2010
  • Status: Active Grant
First Claim
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1. An actuator assembly, comprising:

  • a planar mounting platform that defines a first plane;

    a plurality of planar actuators, each actuator including at least one elongated output shaft having an output end coupled to an output coupler that is coupled to the mounting platform;

    wherein each actuator defines an additional plane that is formed at a common non-zero angle with respect to the first plane; and

    wherein the common angle is less than ninety degrees.

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