Scalable and high yield synthesis of transition metal bis-diazabutadienes
First Claim
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1. A method for forming a transition metal bis-diazabutadiene comprising:
- reacting in a first step, in the absence of a reducing agent, a diazabutadiene (DABD) with a transition metal halide and forming a DABD-metal halide complex, wherein said DABD has the following structure;
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Abstract
The present disclosure is directed at the synthesis of transition metal bis-diazabutadienes as precursors to enable atomic layer deposition (ALD) or chemical vapor deposition (CVD) of transition metals on metallic surfaces. The transition metal bis-diazabutadienes may be prepared in a two-step synthetic procedure at relatively high yields and are particularly suitable for industrial scale-up.
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7 Claims
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1. A method for forming a transition metal bis-diazabutadiene comprising:
reacting in a first step, in the absence of a reducing agent, a diazabutadiene (DABD) with a transition metal halide and forming a DABD-metal halide complex, wherein said DABD has the following structure; - View Dependent Claims (2, 3, 4, 5, 6, 7)
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