Double-axial, shock-resistant rotation rate sensor with nested, linearly oscillating seismic elements
First Claim
1. A micromechanical rotation rate sensor, comprising a substrate whose base surface is aligned parallel to a plane comprising an x-axis and a y-axis, with the rotation rate sensor having at least one first seismic mass and a second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor configured to detect rotation rates about at least two mutually essentially orthogonal sensitive axes, whereinat least the second seismic mass is in the form of a frame which at least partially surrounds the first seismic mass with respect to the position on the plane,wherein the first and second seismic masses are coupled to one another by at least one first and one second coupling device that comprises at least one essentially rigid coupling beam and at least one torsion spring for allowing rotational deflection about one or two axes and for suppressing further rotational deflections and all translational deflections of the least one essentially rigid coupling beam coupling beam.
1 Assignment
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Accused Products
Abstract
A micromechanical rotation rate sensor, including a substrate whose base surface is aligned parallel to the x-y plane of a Cartesian coordinate system, with the rotation rate sensor having at least one first seismic mass and a second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the second seismic mass is in the form of a frame which at least partially surrounds the first seismic mass with respect to the position on the x-y plane.
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Citations
15 Claims
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1. A micromechanical rotation rate sensor, comprising a substrate whose base surface is aligned parallel to a plane comprising an x-axis and a y-axis, with the rotation rate sensor having at least one first seismic mass and a second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor configured to detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein
at least the second seismic mass is in the form of a frame which at least partially surrounds the first seismic mass with respect to the position on the plane, wherein the first and second seismic masses are coupled to one another by at least one first and one second coupling device that comprises at least one essentially rigid coupling beam and at least one torsion spring for allowing rotational deflection about one or two axes and for suppressing further rotational deflections and all translational deflections of the least one essentially rigid coupling beam coupling beam.
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15. A micromechanical rotation rate sensor, comprising:
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a substrate whose base surface is aligned parallel to a plane comprising an x-axis and a y-axis, with the rotation rate sensor having at least one first seismic mass and a second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor configured to detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the second seismic mass is in the form of a frame which at least partially surrounds the first seismic mass with respect to the position on the plane, and wherein the deflection of the first and second seismic masses in each of at least two read modes are detected, with the deflection of one of the two seismic masses in each case being detected in opposite phases by two read devices with respect to the antiphase deflection, wherein one seismic mass is in phase and to the other seismic mass is in antiphase, and at least two read devices for detecting a capacitance increase when the other read device detects a capacitance decrease.
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Specification