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Photo-acoustic gas sensor and method for the production and use thereof

  • US 9,068,926 B2
  • Filed: 10/07/2010
  • Issued: 06/30/2015
  • Est. Priority Date: 10/15/2009
  • Status: Active Grant
First Claim
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1. A photo-acoustic gas sensor, comprising a resonance body and an interferometer for identification of an oscillation of the resonance body by an optical detection of a location of at least one partial area of the resonance body, wherein the interferometer is arranged on exactly one substrate of a semiconductor material, and the resonance body is formed by at least one first cutout in the substrate which at least partly separates a first elongated element of the substrate from a portion of the substrate, wherein at least one of a device for generating light, a device for detecting light, a device for electronic signal processing, or a device for energy supply is integrated on the substrate of the semiconductor material.

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