Capacitance detector for accelerometer and gyroscope and accelerometer and gyroscope with capacitance detector
First Claim
1. A device, comprising:
- a base substrate having a first bonding pad and a peripheral pad provided thereon, the peripheral pad encompassing the first bonding pad;
a first acoustic resonator and a second acoustic resonator disposed on the base substrate;
a lid substrate having a bonding pad seal and a peripheral pad seal provided thereon, the bonding pad seal bonding around the perimeter of the first bonding pad and the peripheral pad seal bonding with the peripheral pad to define a hermetically sealed volume between the lid substrate and the base substrate, the lid substrate defining a through hole therein positioned over the first bonding pad, the through hole providing access for an electrical connection to the first bonding pad; and
electronic circuitry provided on a portion of a first surface of the lid substrate within the hermetically sealed volume, the electronic circuitry comprising;
first oscillator circuitry electrically connected with the first acoustic resonator to form a first oscillator, the first oscillator further being electrically connected to a first capacitor of a teeter-totter capacitive transducer such that a first oscillator frequency of the first oscillator changes in response to a change in the capacitance of the first capacitor; and
second oscillator circuitry electrically connected with the second acoustic resonator to form a second oscillator, the second oscillator further being electrically connected to a second capacitor of the teeter-totter capacitive transducer such that a second oscillator frequency of the second oscillator changes in response to a change in the capacitance of the second capacitor.
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Accused Products
Abstract
A capacitance-to-frequency converter is configured to convert a difference between first and second capacitances produced of a teeter-totter capacitive transducer as a result of a rotational force being applied to the teeter-totter capacitive transducer to a first signal having a first frequency that is a function of the rotational force, and to convert a sum of the first and second capacitances produced as a result of an acceleration force to a second signal having a second frequency that is a function of the acceleration force. The capacitance-to-frequency converter includes a first oscillator having a first oscillator frequency that changes in response to a change in the first capacitance; a second oscillator having a second oscillator frequency that changes in response to a change in the second capacitance; and a mixer having first and second mixer inputs connected outputs of the first and second oscillators.
54 Citations
18 Claims
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1. A device, comprising:
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a base substrate having a first bonding pad and a peripheral pad provided thereon, the peripheral pad encompassing the first bonding pad; a first acoustic resonator and a second acoustic resonator disposed on the base substrate; a lid substrate having a bonding pad seal and a peripheral pad seal provided thereon, the bonding pad seal bonding around the perimeter of the first bonding pad and the peripheral pad seal bonding with the peripheral pad to define a hermetically sealed volume between the lid substrate and the base substrate, the lid substrate defining a through hole therein positioned over the first bonding pad, the through hole providing access for an electrical connection to the first bonding pad; and electronic circuitry provided on a portion of a first surface of the lid substrate within the hermetically sealed volume, the electronic circuitry comprising; first oscillator circuitry electrically connected with the first acoustic resonator to form a first oscillator, the first oscillator further being electrically connected to a first capacitor of a teeter-totter capacitive transducer such that a first oscillator frequency of the first oscillator changes in response to a change in the capacitance of the first capacitor; and second oscillator circuitry electrically connected with the second acoustic resonator to form a second oscillator, the second oscillator further being electrically connected to a second capacitor of the teeter-totter capacitive transducer such that a second oscillator frequency of the second oscillator changes in response to a change in the capacitance of the second capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification