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Self test of MEMS gyroscope with ASICs integrated capacitors

  • US 9,069,006 B2
  • Filed: 02/12/2013
  • Issued: 06/30/2015
  • Est. Priority Date: 04/05/2012
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • a micro-electromechanical system (MEMS) gyroscope sensor including a first sensing capacitor and a second sensing capacitor; and

    an integrated circuit (IC), including;

    a switch circuit configured to electrically decouple the first sensing capacitor from a first input of the IC and electrically couple the second sensing capacitor to a second input of the IC; and

    a capacitance measurement circuit configured to measure a capacitance of the second sensing capacitor of the MEMS gyroscope sensor during application of a first electrical signal to the decoupled first capacitive element.

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