3-axis magnetic field sensor, method for fabricating magnetic field sensing structure and magnetic field sensing circuit
First Claim
1. A 3-axis magnetic field sensor, comprising:
- a first in-plane magnetic field sensor, located on a substrate to sense an X-axis magnetic field, and having a first tunneling magneto-resistor (TMR) and a first easy-axis, wherein the first easy-axis is regarded as a Y-axis;
a second in-plane magnetic field sensor, located on the substrate to sense a Y-axis magnetic field, and having a second TMR and a second easy-axis, wherein the second easy-axis is regarded as an X-axis,an included angle between the first easy-axis and the second easy-axis is 90±
10 degrees, and a bisection direction on the substrate respectively include an angle of 45±
5 degrees with the first easy-axis and the second easy-axis;
an out-of-plane magnetic field sensor, located on the substrate to sense a Z-axis magnetic field, and the out-of-plane magnetic field sensor comprising;
a groove or bulge structure, located on the substrate, and having a first incline, a second incline and a central axis, wherein the first incline and the second incline have a same bevel angle relative to the substrate and are symmetric relative to the central axis, and the central axis is orthogonal to the bisection direction;
a third TMR, formed on the first incline, and having a third easy-axis;
a fourth TMR, formed on the second incline, and having a fourth easy-axis,wherein the third easy-axis and the fourth easy-axis are parallel to the central axis; and
a tunneling magneto-resistance reference unit, located on the substrate, and having a fifth TMR and a fifth easy-axis, wherein the fifth easy-axis is parallel to the bisection direction.
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Abstract
A 3-axis magnetic field sensor on a substrate and including, a first tunneling magneto-resistor (TMR) having a first easy-axis for sensing a X-axis magnetic field, a second TMR having a second easy-axis for sensing a Y-axis magnetic field, an out-of-plane magnetic sensor for sensing a Z-axis magnetic field, and a reference unit is provided. The first easy-axis and the second easy-axis are orthogonal and include an angle of 45±5 degrees with a bisection direction, respectively. The out-of-plane magnetic sensor includes a groove or bulge structure having a first incline and a second incline; a third TMR on the first incline having a third easy-axis; a fourth TMR on the second incline having a fourth easy-axis; and a central axis orthogonal to the bisection direction and parallel to the third easy-axis and the fourth easy-axis. The reference unit has a fifth TMR and a fifth easy-axis parallel to the bisection direction.
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Citations
13 Claims
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1. A 3-axis magnetic field sensor, comprising:
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a first in-plane magnetic field sensor, located on a substrate to sense an X-axis magnetic field, and having a first tunneling magneto-resistor (TMR) and a first easy-axis, wherein the first easy-axis is regarded as a Y-axis; a second in-plane magnetic field sensor, located on the substrate to sense a Y-axis magnetic field, and having a second TMR and a second easy-axis, wherein the second easy-axis is regarded as an X-axis, an included angle between the first easy-axis and the second easy-axis is 90±
10 degrees, and a bisection direction on the substrate respectively include an angle of 45±
5 degrees with the first easy-axis and the second easy-axis;an out-of-plane magnetic field sensor, located on the substrate to sense a Z-axis magnetic field, and the out-of-plane magnetic field sensor comprising; a groove or bulge structure, located on the substrate, and having a first incline, a second incline and a central axis, wherein the first incline and the second incline have a same bevel angle relative to the substrate and are symmetric relative to the central axis, and the central axis is orthogonal to the bisection direction; a third TMR, formed on the first incline, and having a third easy-axis; a fourth TMR, formed on the second incline, and having a fourth easy-axis, wherein the third easy-axis and the fourth easy-axis are parallel to the central axis; and a tunneling magneto-resistance reference unit, located on the substrate, and having a fifth TMR and a fifth easy-axis, wherein the fifth easy-axis is parallel to the bisection direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification