Nanoporous metal multiple electrode array and method of making same

• US 9,070,492 B2
• Filed: 09/13/2011
• Issued: 06/30/2015
• Est. Priority Date: 09/14/2010
• Status: Expired due to Fees

• Current Assignee: The General Hospital Corporation (Mass General Brigham, Inc.)
• Original Assignee: The General Hospital Corporation (Mass General Brigham, Inc.)
• Inventors: Yarmush, Martin L., Seker, Erkin, Berdichevsky, Yevgeny
• Primary Examiner(s): Cohen, Lee S
• Application Number:
  US13/822,747
• Publication Number:
  US 20130245416A1
• Time in Patent Office: 1,386 Days
• Field of Search: 600/373, 600/377, 600/378
• US Class Current: 1/1
• CPC Class Codes: A61B 5/24 Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
• CPC Class Codes: A61B 5/296 for electromyography [EMG]
• CPC Class Codes: G01N 33/4836 using multielectrode arrays
• CPC Class Codes: H01B 7/30 with arrangements for reducing conductor losses when carrying alternating current, e.g. due to skin effect

Abstract

A method is disclosed for fabricating a low-impedance nanoporous metal multiple electrode array for measuring electrophysiology activity. A patterned photoresist is applied to a substrate, in which the patterned photoresist corresponds to a pattern of the nanoporous metal multiple electrode array. A metal alloy including a sacrificial alloying element is deposited in the pattern of the nanoporous metal electrode array. The patterned photoresist is removed to expose the metal alloy as deposited. At least part of the sacrificial alloying element is removed from the metal alloy to create nanoporous metal electrode tips thereby forming the nanoporous metal multiple electrode array. The resultant nanoporous metal multiple electrode array has improved impedance characteristics in comparison to conventional multiple electrode arrays.

Claims

1. A low-impedance nanoporous metal electrode array for measuring electrophysiological activity, the array comprising a patterned multiple electrode array including a metal alloy, the patterned multiple electrode array having a plurality of leads each extending from a contact pad to a nanoporous metal electrode tip that is configured to measure electrophysiological activity.

2. The array of claim 1, wherein the metal alloy includes gold and a sacrificial alloying element and wherein the nanoporous metal electrode tip is substantially free of the sacrificial alloying element.

3. The array of claim 2, wherein the sacrificial alloying element is silver.

4. The array of claim 2, wherein the nanoporous metal electrode tip is configured to reduce the impedance of the electrode tip relative to a substantially pore-less gold electrode tip of similar dimensions.

5. The array of claim 4, wherein the impedance of the nanoporous metal electrode tip is at least approximately twenty five times less than the impedance of the substantially pore-less electrode tip of similar dimensions.

6. The array of claim 2, wherein the electrode tips substantially comprise a nanoporous gold material and at least a portion of the leads comprises a gold alloy including gold and the sacrificial alloying element.

7. The array of claim 1, wherein the leads are substantially covered by a patterned insulation layer except for the electrode tips and the contact pads.

8. The array of claim 1, wherein the nanoporous metal multiple electrode array has a percent porosity of between approximately 26% and approximately 38%.

9. The array of claim 1, wherein the nanoporous metal multiple electrode array further supports at least one chemical agent that is configured for selective release from the nanoporous metal multiple electrode array.

10. The array of claim 9, wherein the at least one chemical agent is selected from a group consisting of anti-inflammatories and immunosuppresants.

11. The array of claim 9, wherein the nanoporous metal multiple electrode array is configured to both monitor electrophysiological activity and selectively release the at least one chemical agent to modify said electrophysiological activity.