Measuring apparatus and plasma processing apparatus

• US 9,070,725 B2
• Filed: 03/30/2012
• Issued: 06/30/2015
• Est. Priority Date: 03/30/2011
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Matsudo, Tatsuo, Kimura, Hidetoshi
• Primary Examiner(s): Baldwin, Gordon R
• Assistant Examiner(s): Bennett, Charlee
• Application Number:
  US13/435,656
• Publication Number:
  US 20120247669A1
• Time in Patent Office: 1,187 Days
• US Class Current: 1/1
• CPC Class Codes: G01K 11/00 Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
• CPC Class Codes: G01K 5/50 arranged for free expansion or contraction
• CPC Class Codes: H01J 37/32972 Spectral analysis
• CPC Class Codes: H01L 21/67248 Temperature monitoring

Claims