Piezoelectric transducers using micro-dome arrays
First Claim
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1. A piezoelectric transducer, comprising:
- a vibrating element comprising a drive electrode, a reference electrode, a piezoelectric element disposed between the drive electrode and the reference electrode, a dielectric layer disposed between the drive electrode and the reference electrode; and
a base supporting the vibrating element on a first surface of the base and including integrated circuitry electrically connected to the drive electrode and the reference electrode of the vibrating element,wherein the drive electrode, the reference electrode, and the piezoelectric element each include a respective flexible portion and a respective stationary portion connected to the respective flexible portion,wherein the flexible portions of the drive electrode, reference electrode, and piezoelectric element are suspended over a same area of the first surface and are curved in a first direction relative to the first surface of the base in the absence of an applied voltage between the drive electrode and the reference electrode,wherein the flexible portions of the reference electrode, drive electrode, and piezoelectric element deflect in response to a driving voltage applied between the drive electrode and the reference electrode,wherein the transducer has an exposed outer surface facing a direction pointing from the base to the vibrating element, and the exposed outer surface of the transducer includes an outer surface of the vibrating element or an outer surface of a flexible film covering the outer surface of the vibrating element, andwherein the exposed outer surface of the transducer deflects in conformity with the deflection of the flexible portions of the reference electrode, drive electrode, and piezoelectric element.
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Abstract
An ultrasonic piezoelectric transducer device includes a transducer array consisting of an array of vibrating elements, and a base to which the array of vibrating elements in the transducer array are attached. The base include integrated electrical interconnects for carrying driving signals and sensed signals between the vibrating elements and an external control circuit. The base can be an ASIC wafer that includes integrated circuitry for controlling the driving and processing the sensed signals. The interconnects and control circuits in the base fit substantially within an area below the array of multiple vibrating elements.
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Citations
36 Claims
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1. A piezoelectric transducer, comprising:
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a vibrating element comprising a drive electrode, a reference electrode, a piezoelectric element disposed between the drive electrode and the reference electrode, a dielectric layer disposed between the drive electrode and the reference electrode; and a base supporting the vibrating element on a first surface of the base and including integrated circuitry electrically connected to the drive electrode and the reference electrode of the vibrating element, wherein the drive electrode, the reference electrode, and the piezoelectric element each include a respective flexible portion and a respective stationary portion connected to the respective flexible portion, wherein the flexible portions of the drive electrode, reference electrode, and piezoelectric element are suspended over a same area of the first surface and are curved in a first direction relative to the first surface of the base in the absence of an applied voltage between the drive electrode and the reference electrode, wherein the flexible portions of the reference electrode, drive electrode, and piezoelectric element deflect in response to a driving voltage applied between the drive electrode and the reference electrode, wherein the transducer has an exposed outer surface facing a direction pointing from the base to the vibrating element, and the exposed outer surface of the transducer includes an outer surface of the vibrating element or an outer surface of a flexible film covering the outer surface of the vibrating element, and wherein the exposed outer surface of the transducer deflects in conformity with the deflection of the flexible portions of the reference electrode, drive electrode, and piezoelectric element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 27, 28, 29, 30, 31)
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23. A piezoelectric transducer, comprising:
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a vibrating element comprising a drive electrode, a reference electrode, a piezoelectric element disposed between the drive electrode and the reference electrode, and a dielectric layer disposed between the drive electrode and the reference electrode; and a base supporting the vibrating element on a first surface of the base and including integrated circuitry electrically connected to the drive electrode and the reference electrode of the vibrating element by vertically extending electrical connections, wherein the drive electrode, the reference electrode, and the piezoelectric element each include a respective flexible portion and a respective stationary portion connected to the respective flexible portion, wherein the flexible portions of the drive electrode, reference electrode, and piezoelectric element are suspended over a same area of the first surface, wherein the flexible portions of the reference electrode, drive electrode, and piezoelectric element deflects in response to a driving voltage applied between the drive electrode and the reference electrode, wherein the transducer has an exposed outer surface facing a direction pointing from the base to the vibrating element, and the exposed outer surface of the transducer includes an outer surface of the vibrating element or an outer surface of a flexible film covering the outer surface of the vibrating element, and wherein the exposed outer surface of the transducer-deflects in conformity with the deflection of the flexible portions of the reference electrode, drive electrode, and piezoelectric element. - View Dependent Claims (24, 25, 26, 32, 33, 34, 35, 36)
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Specification