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MEMS microphone and electronic equipment having the MEMS microphone

  • US 9,073,747 B2
  • Filed: 09/06/2013
  • Issued: 07/07/2015
  • Est. Priority Date: 05/28/2013
  • Status: Active Grant
First Claim
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1. A microelectromechanical system (MEMS) microphone, characterized by, at least comprises:

  • a microphone chip containing an acoustic and electric sensor, converting sound wave into change of plate spacing of capacitance in the acoustic and electric sensor, and output electric signal about the change of voltage according to the change of plate spacing;

    a package shell packaging the microphone chip, wherein, it is provided a sound hole on the package shell, the sound hole is positioned on the side face of the microphone chip, it is also provided pins derived from the microphone chip on the side face of the package shell adjacent to the sound hole; and

    a dust-proof component attached over the acoustic and electric sensor wherein the dust-proof component is attached on a side of the sound hole and aslant arranged over the acoustic and electric sensor.

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