Double-axle, shock-resistant rotation rate sensor with linear and rotary seismic elements
First Claim
1. A micromechanical rotation rate sensor, comprising a substrate whose base surface is aligned parallel to the x-y plane of a Cartesian coordinate system (x, y, z), with the rotation rate sensor having at least one first and one second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are deflected in antiphase in one drive mode, with the rotation rate sensor being designed to detect rotation rates about at least two mutually essentially orthogonal sensitive axes (z, y), whereinat least the first and the second seismic masses oscillate in antiphase in a first read mode when a first rotation rate about the first sensitive axis (y) is detected, the first and second seismic masses and/or additional seismic masses oscillate in antiphase in a second read mode when a second rotation rate about the second sensitive axis (z) is detected, and the first and the second seismic masses oscillate in antiphase in a rotational drive mode,wherein the seismic masses are each associated with a phase read device and an anti-phase read device which are designed and arranged with respect to respective seismic masses to detect the deflections of the respective seismic masses with respect to the first and with respect to the second read mode in each case in phase and in antiphase.
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Accused Products
Abstract
A micromechanical rotation rate sensor has at least one first and one second seismic mass coupled to at least one first drive device and are suspended such that the first and second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the first and second seismic masses are designed and suspended such that they oscillate in antiphase in a first read mode when a first rotation rate about the first sensitive axis is detected, and the first and second seismic masses and/or additional seismic masses are designed and suspended such that they oscillate in antiphase in a second read mode when a second rotation rate about the second sensitive axis is detected.
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Citations
16 Claims
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1. A micromechanical rotation rate sensor, comprising a substrate whose base surface is aligned parallel to the x-y plane of a Cartesian coordinate system (x, y, z), with the rotation rate sensor having at least one first and one second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are deflected in antiphase in one drive mode, with the rotation rate sensor being designed to detect rotation rates about at least two mutually essentially orthogonal sensitive axes (z, y), wherein
at least the first and the second seismic masses oscillate in antiphase in a first read mode when a first rotation rate about the first sensitive axis (y) is detected, the first and second seismic masses and/or additional seismic masses oscillate in antiphase in a second read mode when a second rotation rate about the second sensitive axis (z) is detected, and the first and the second seismic masses oscillate in antiphase in a rotational drive mode, wherein the seismic masses are each associated with a phase read device and an anti-phase read device which are designed and arranged with respect to respective seismic masses to detect the deflections of the respective seismic masses with respect to the first and with respect to the second read mode in each case in phase and in antiphase.
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14. A micromechanical rotation rate sensor, comprising a substrate whose base surface is aligned parallel to the x-y plane of a Cartesian coordinate system (x, y, z), with the rotation rate sensor having at least one first and one second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are deflected in antiphase in one drive mode, with the rotation rate sensor being designed to detect rotation rates about at least two mutually essentially orthogonal sensitive axes (z, y), wherein
at least the first and the second seismic masses oscillate in antiphase in a first read mode when a first rotation rate about the first sensitive axis (y) is detected, and the first and second seismic masses and/or additional seismic masses oscillate in antiphase in a second read mode when a second rotation rate about the second sensitive axis (z) is detected, wherein the seismic masses are each associated with a phase read device and an anti-phase read device which are designed and arranged with respect to respective seismic masses to detect the deflections of the respective seismic masses with respect to the first and with respect to the second read mode in each case in phase and in antiphase, wherein the deflection of any of the seismic masses which oscillate in one of the read modes is detected in a duplicated and differential manner, with in each case two opposing deflections being detected with respect to the antiphase deflection for phase and for antiphase, and wherein the seismic masses which oscillate in one of the read modes are associated overall with at least four read devices.
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16. A micromechanical rotation rate sensor, comprising a substrate whose base surface is aligned parallel to the x-y plane of a Cartesian coordinate system (x, y, z), with the rotation rate sensor having at least one first and one second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are deflected in antiphase in one drive mode, with the rotation rate sensor being designed to detect rotation rates about at least two mutually essentially orthogonal sensitive axes (z, y),
wherein at least the first and the second seismic masses oscillate in antiphase in a first read mode when a first rotation rate about the first sensitive axis (y) is detected, and the first and second seismic masses and/or additional seismic masses oscillate in antiphase in a second read mode when a second rotation rate about the second sensitive axis (z) is detected, wherein the seismic masses are each associated with read devices which are designed and arranged with respect to the seismic masses such that the read devices detect the deflections of the seismic masses with respect to the first and with respect to the second read mode in each case in phase and in antiphase, and wherein the first and the second seismic masses oscillate in antiphase in a rotational drive mode.
Specification