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Microelectromechanical accelerometer with wireless transmission capabilities

  • US 9,075,078 B2
  • Filed: 09/23/2011
  • Issued: 07/07/2015
  • Est. Priority Date: 09/28/2010
  • Status: Active Grant
First Claim
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1. A microelectromechanical system, comprising:

  • a mass element;

    a substrate;

    a signal generator; and

    a fixing structure configured to fix the mass element to the substrate;

    wherein the mass element comprises a chip with a signal detector and an evaluator;

    wherein the mass element is fixed in such a way that, upon an acceleration of the microelectromechanical system, the mass element can be moved relative to the substrate in at least two spatial directions, andwherein a signal is generated by the movement of the mass element by means of the signal generator.

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