Fluid delivery for scanning probe microscopy

• US 9,075,082 B2
• Filed: 05/29/2013
• Issued: 07/07/2015
• Est. Priority Date: 03/07/2002
• Status: Expired due to Fees

• Current Assignee: Victor B. Kley
• Original Assignee: Victor B. Kley
• Inventors: Kley, Victor B.
• Primary Examiner(s): Johnston, Phillip A
• Application Number:
  US13/904,892
• Publication Number:
  US 20140082776A1
• Time in Patent Office: 769 Days
• Field of Search: 850/1, 850/21
• US Class Current: 1/1
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: B82Y 99/00 Subject matter not provided for in other groups of this subclass
• CPC Class Codes: G01Q 30/12 Fluid environment
• CPC Class Codes: G01Q 30/14 Liquid environment
• CPC Class Codes: G01Q 60/00 Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
• CPC Class Codes: G01Q 80/00 Applications, other than SPM, of scanning-probe techniques manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08
• CPC Class Codes: Y10S 977/849 with scanning probe
• CPC Class Codes: Y10S 977/856 including etching/cutting
• CPC Class Codes: Y10S 977/902 Specified use of nanostructure
• CPC Class Codes: Y10T 29/53 Means to assemble or disassemble

Abstract

A gas (or fluid) is introduced around an SPM probe or Nanotool™ to control chemical activity e.g., oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging due to the action of the probe or nanotools and to provide vacuum at and around the tip and substrate area. Electrical current can be produced for use with active electronic devices on, in or near the body of the device. In addition by use of a fluid like water, certain oils, and other liquids in conjunction with specific tip structure either electric discharge machining can be used at the tip area on the tip itself (in conjunction with a form structure on the work piece) or on a work piece beneath the tip to shape, polish and remove material at very small scales (10 microns to 1 nm or less).

Claims

1. A micro electromechanical systems (MEMS) scanning probe microscopy (SPM) cantilever device for supporting a tip, the SPM cantilever device comprising:

a first cantilever portion configured to support the tip; and

a second cantilever portion distinct from the first cantilever portion;

wherein the second cantilever portion includes one or more fluidic channels that are spaced from the first cantilever portion to communicate fluid between a region spaced from the tip and a region proximate the outside of the tip without the fluid passing through the tip.

2. The SPM cantilever device of claim 1 wherein local or integrated pumps and/or valves provide for the delivery and/or control of fluids or gases.

3. The SPM cantilever device of claim 2 wherein the fluid channel also functions as an active mechanical or electromechanical member.

4. The SPM cantilever device of claim 2 and further comprising one or more movable members that act as passive elements.

5. The SPM cantilever device of claim 2 and further comprising one or more movable members that act as passive elements and are activated or operated by external mechanical, vacuum, or fluid induced forces.

6. The SPM cantilever device of claim 1 wherein:

the SPM cantilever device is formed from a silicon-on-insulator (SOI) wafer having a handle layer and a device layer;

the device layer is patterned to provide the first and second cantilever portions;

the fluidic channels are formed in the device layer in portions on either side of the first cantilever portion that supports the tip to provide fluid communication at the region proximate the outside of the tip; and

the handle layer is formed with one or more recesses in fluid communication with the fluidic channels.

7. A scanning probe microscopy (SPM) assembly comprising:

a cantilever structure; and

a tip supported at an end portion of the cantilever structure;

wherein,

the cantilever structure is formed with one or more fluidic channels that communicate fluid between a region spaced from the tip and a region proximate the outside of the tip, and

the fluidic channels are formed without passing through the tip.

8. The SPM cantilever assembly of claim 7 wherein:

the cantilever structure is formed from a silicon-on-insulator (SOI) wafer having a handle layer and a device layer;

the device layer is patterned to provide the end portion of the cantilever that supports the tip;

the fluidic channels are formed in the device layer in portions on either side of the cantilever portion that supports the tip to provide fluid communication at the region proximate the outside of the tip; and

the handle layer is formed with one or more recesses in fluid communication with the fluidic channels.