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Three-dimensional memory structures having shared pillar memory cells

  • US 9,076,518 B2
  • Filed: 02/03/2012
  • Issued: 07/07/2015
  • Est. Priority Date: 12/24/2008
  • Status: Active Grant
First Claim
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1. A method of making non-volatile memory, comprising:

  • forming a first set of substantially parallel and substantially coplanar conductors;

    forming a second set of substantially parallel and substantially coplanar conductors vertically separated from the first set of conductors; and

    forming a set of pillars in communication with the first set of conductors and the second set of conductors, each pillar of the set of pillars having a first end surface and a second end surface, the first end surface contacting one conductor of the first set of conductors, the second end surface contacting two conductors of the second set of conductors, said each pillar including a first non-volatile storage element having a first state change element and a first steering element and a second non-volatile storage element having a second state change element and a second steering element.

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