Position sensitive STEM detector

• US 9,076,632 B2
• Filed: 02/12/2013
• Issued: 07/07/2015
• Est. Priority Date: 02/12/2012
• Status: Active Grant

• Current Assignee: El-Mul Technologies Ltd. (PHOTONIS Technologies SAS)
• Original Assignee: El-Mul Technologies Ltd. (PHOTONIS Technologies SAS)
• Inventors: Reinhorn, Silviu, Cheifetz, Eli, Weingarten, Amit
• Primary Examiner(s): Wells, Nikita
• Application Number:
  US14/378,098
• Publication Number:
  US 20150034822A1
• Time in Patent Office: 875 Days
• Field of Search: 250/311, 250/310, 250/307, 250/306, 250/397, 250/370.11
• US Class Current: 1/1
• CPC Class Codes: G01N 23/04 and forming images of the material
• CPC Class Codes: H01J 2237/221 Image processing
• CPC Class Codes: H01J 2237/2443 Scintillation detectors
• CPC Class Codes: H01J 2237/2445 Photon detectors for X-rays, light, e.g. photomultipliers
• CPC Class Codes: H01J 2237/2446 Position sensitive detectors
• CPC Class Codes: H01J 2237/26 Electron or ion microscopes
• CPC Class Codes: H01J 2237/2802 Transmission microscopes
• CPC Class Codes: H01J 2237/2806 Secondary charged particle
• CPC Class Codes: H01J 37/244 Detectors; Associated components or circuits therefor
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

A STEM system is disclosed wherein an imaging system is used to image the electron scatter pattern plane of the HAADF detector onto a two-dimensional array detector. A data acquisition system stores and processes the data from the two-dimensional array detector. For each illumination pixel of the STEM, one frame of data is generated and stored Each frame includes data of all scattered angles and can be analyzed in real time or in off-line at any time after the scan. A method is disclosed for detecting electrons emitted from a sample by detecting electrons scattered from the sample and generating plurality of corresponding signals, each signal indicative of scattering angle of a scattered electron; generating a plurality of signal groups, each signal group being a collection of signals of a user selected scattering angle.

Claims

1. A High Angle Annular Dark Field (HAADF) detector assembly operating within a Scanning Transmitting Electron Microscope (STEM), provided to detect electrons emitted from a sample that is being scanned by an electron beam, comprising:

a scintillator comprising an annular scintillating plate having a scintillating surface and a central aperture configured to enable passage of non-scattered electrons, the scintillating surface emitting light signals corresponding to impingement of scattered electrons thereupon;

a two-dimensional sensor having a light sensing surface and plurality of electrical outputs;

an optical imaging system configured to form an image of the scintillating surface on the light sensing surface of the two-dimensional sensor by transferring light signals produced in any specific location of the scintillating surface onto a corresponding position on the light sensing surface and thereby maintaining spatial information of the light signals; and

, an image processing unit receiving output signals from plurality of electrical outputs of the two-dimensional sensor and providing information of images related to selected positions of the electrons impinging the scintillation surface.

2. The detector assembly of claim 1, wherein the optical imaging system comprises a mirror having an aperture configured for passing non-scattered electrons.

3. The detector assembly of claim 2, further comprising a lens positioned between the mirror and the two-dimensional sensor.

4. The detector assembly of claim 3, further comprising a second lens positioned between the mirror and the scintillator, the second lens having an aperture configured for passing non-scattered electrons.

5. The detector assembly of claim 1, wherein the two-dimensional sensor comprises one of a multi-wire photomultiplier tube or multi-anode photomultiplier tube or multi anode MCP-PMT.

6. The detector assembly of claim 1, wherein the optical imaging system comprises a coherent fiber optic bundle.

7. The detector assembly of claim 1, wherein the two-dimensional sensor comprises n by k sensor elements, and wherein the image processing unit is configured to sample a frame of n×

k pixels for each one pixel of the electron beam scan.

8. The detector assembly of claim 7, wherein the image processing unit comprises n×

k pre-amplifiers, each coupled to a corresponding one of the n×

k sensor elements.

9. The detector assembly of claim 8, wherein the image processing unit comprises N simultaneous outputs, each programmable to provide an output signal corresponding to a group of selected sensor elements.

10. The detector assembly of claim 9, wherein each of the group of selected sensor elements defines an annular ring or a section of an annular ring.

11. The detector assembly of claim 1, wherein the optical imaging system further comprises a variable magnification lens assembly.

12. A High Angle Annular Dark Field detector assembly operating within a Scanning Transmitting Electron Microscope (STEM), comprising:

an annular electron sensor having a sensing surface configured for sensing scattered electrons passing through a sample and having a central aperture configured to pass non-scattered electrons;

a sampling unit coupled to the sensing surface and generating a plurality of signals indicating amplitude and spatial location of impinging electrons on the sensing surface; and

,

an image processing unit simultaneously generating a plurality of video signals, each corresponding to a selected group from the plurality of the sensor signals.

13. The detector assembly of claim 12, wherein the sampling unit comprises a two-dimensional light sensor array.

14. The detector assembly of claim 12, wherein each of the plurality of video signals corresponds to a selected scattering angle range of the scattered electrons or selected area on the annular electron sensor.

15. The detector assembly of claim 12, further comprising a variable magnification lens arrangement.

16. A method for detecting electrons emitted from a sample in a scanning transmission electron microscope, comprising:

using a scintillating plate for detecting electrons scattered from the sample;

projecting an image of the scintillating plate onto a two-dimensional light sensor and generating a plurality of corresponding signals, each signal indicative of a scattering angle of a scattered electron;

generating a plurality of signal groups, each signal group being a collection of signals of a user selected scattering angle range;

converting each of the signal groups into an individual video signal and displaying the video signal on a monitor.

17. The method of claim 16, further comprising allowing non-scattered electrons to pass through an aperture in the scintillating plate.

18. The method of claim 16, further comprising storing the corresponding signals in a computer memory to enable post processing.

19. The method of claim 16, further comprising recording all detected sensor signal for off-line selection and evaluation of various regions of interest.

20. The method of claim 16, wherein projecting an image further comprises varying the magnification of the projected image.