Energy harvesting with a micro-electro-machanical system (MEMS)
First Claim
1. An energy harvesting microstructure, comprising:
- a substrate,a first buckled membrane, the first buckled membrane has a buckling axis and is connected to the substrate, the first buckled membrane further comprising;
a transduction material,a first conductor, the first conductor is applied to the transduction material; and
a second conductor, the second conductor is applied to the transduction material, wherein electrical charge is harvested from the transduction material when the first buckled membrane is translated along the buckling axis.
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Abstract
Apparatuses and method are described to create an energy harvesting microstructure, referred to herein as a transduction micro-electro mechanical system (T-MEMS). A T-MEMS includes a substrate, a first buckled membrane, the first buckled membrane has a buckling axis and is connected to the substrate. The first buckled membrane further includes a transduction material, a first conductor, the first conductor is applied to a first area of the transduction material; and a second conductor, the second conductor is applied to a second area of the transduction material, wherein electrical charge is harvested from the transduction material when the first buckled membrane is translated along the buckling axis.
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Citations
47 Claims
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1. An energy harvesting microstructure, comprising:
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a substrate, a first buckled membrane, the first buckled membrane has a buckling axis and is connected to the substrate, the first buckled membrane further comprising; a transduction material, a first conductor, the first conductor is applied to the transduction material; and a second conductor, the second conductor is applied to the transduction material, wherein electrical charge is harvested from the transduction material when the first buckled membrane is translated along the buckling axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A microstructure for harvesting energy, comprising:
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a first substrate; a first buckled membrane, the first buckled membrane is connected to the first substrate, the first buckled membrane has a first transduction material; a second substrate; and a second buckled membrane, the second buckled membrane is connected to the second substrate;
the first buckled membrane and the second buckled membrane are in contact over a contact area electrical charge is available for harvesting in the first transduction material when the contact area of the buckled membranes translates along one of their mutually opposite buckling directions. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A method to harvest energy with a microstructure, comprising:
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providing a first potential energy stop; and providing a second potential energy stop, wherein the first potential energy stop and the second potential energy stop are separated by a distance, such that a pair of opposing buckled membranes can flex between the first potential energy stop and the second potential energy stop as a contact area of the opposing buckled membranes translates along a buckling axis, the opposing buckled membranes are formed with a first buckled membrane and a second buckled membrane; and harvesting energy from at least one layer of the opposing buckled membranes when the contact area of the opposing buckled membranes translate along the buckling axis. - View Dependent Claims (30, 31, 32, 33, 34, 35)
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36. A method for harvesting energy with a microstructure, comprising:
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flexing a buckled membrane with a mass, wherein the buckled membrane is attached to the microstructure, the buckled membrane has a transduction material, and the mass is coupled to the transduction material; and harvesting energy from the transduction material during the flexing. - View Dependent Claims (37, 38, 39)
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40. A method for harvesting energy from a microstructure, comprising:
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generating an electrical charge in a transduction layer, the transduction layer is part of a first buckled membrane, the first buckled membrane has a buckling axis, wherein the generating occurs while the transduction layer flexes; and harvesting the electrical charge from the transduction layer when the first buckled membrane is translated along the buckling axis. - View Dependent Claims (41, 42, 43, 44, 45, 46, 47)
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Specification