Microphone assembly with barrier to prevent contaminant infiltration
First Claim
Patent Images
1. A microphone assembly comprising:
- a cover;
a base comprising;
a first material layer having an upper surface and a lower surface, and an acoustic port;
a second material layer disposed on the upper surface of the first material layer, wherein the second material layer has an opening that is larger than the acoustic port in the first material layer, and an axis of the opening in the second material layer is aligned with an axis of the acoustic port in the first material layer; and
a barrier layer comprised of multiple ports, wherein the multiple ports are offset from the axis of the acoustic port, the barrier layer cooperating with the first and second material layers to form an internal cavity in the base;
wherein the multiple ports of the barrier layer and the acoustic port of the first material layer are acoustically coupled to the internal cavity, thereby providing a path for sound from the exterior of the microphone assembly;
a microelectromechanical system (MEMS) device having an internal chamber and disposed on the base, wherein the MEMS device is disposed such that its internal chamber is acoustically coupled to the multiple ports of the barrier layer; and
a cover attached to the base, wherein the cover cooperates with the base to form an acoustic chamber for the MEMS device.
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Abstract
A microphone assembly includes a cover, a base coupled to the cover, a microelectromechanical system (MEMS) device disposed on the base. An opening is formed in the base and the MEMS device is disposed over the opening. The base includes a barrier that extends across the opening and is porous to sound. The remaining portions of the base do not extend across the opening.
221 Citations
41 Claims
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1. A microphone assembly comprising:
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a cover; a base comprising; a first material layer having an upper surface and a lower surface, and an acoustic port; a second material layer disposed on the upper surface of the first material layer, wherein the second material layer has an opening that is larger than the acoustic port in the first material layer, and an axis of the opening in the second material layer is aligned with an axis of the acoustic port in the first material layer; and a barrier layer comprised of multiple ports, wherein the multiple ports are offset from the axis of the acoustic port, the barrier layer cooperating with the first and second material layers to form an internal cavity in the base; wherein the multiple ports of the barrier layer and the acoustic port of the first material layer are acoustically coupled to the internal cavity, thereby providing a path for sound from the exterior of the microphone assembly; a microelectromechanical system (MEMS) device having an internal chamber and disposed on the base, wherein the MEMS device is disposed such that its internal chamber is acoustically coupled to the multiple ports of the barrier layer; and a cover attached to the base, wherein the cover cooperates with the base to form an acoustic chamber for the MEMS device. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A microphone assembly comprising:
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a base comprised of; a first circuit board layer having a plurality of ports; a second circuit board layer having an acoustic port; and a core layer of non-conductive material, the core layer having an opening formed at a predetermined location, wherein the first circuit board layer, the second circuit board layer, and the core layer, when joined together, cooperate to form an internal cavity, wherein the plurality of ports in the first circuit board layer and the acoustic port in the second circuit board layer are acoustically coupled to the internal cavity, thereby providing a path for sound from the exterior of the microphone assembly, and wherein the axes of the plurality of ports in the first circuit board layer and the axis of the acoustic port in the second circuit board layer are not aligned with each other; a microelectromechanical system (MEMS) device disposed on the base, wherein an internal chamber of the MEMS device is aligned over the plurality of ports in the first circuit board layer such that the axis of the acoustic port is aligned with the axis of the internal chamber of the MEMS device; and a cover attached to the base, wherein the cover provides an acoustic chamber for the MEMS device. - View Dependent Claims (9, 10)
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11. A microphone assembly comprising:
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a base having an upper surface and a lower surface, the base further comprising an acoustic port; a microelectromechanical system (MEMS) device having an internal chamber, wherein the MEMS device is disposed on the upper surface of the base and the internal chamber of the MEMS device is aligned with the acoustic port; a barrier element disposed on the upper surface of the base and covering the acoustic port, wherein the barrier element is disposed within the internal chamber of the MEMS device, wherein the barrier element is porous to sound but does not allow particulates to pass through the acoustic port; and a cover attached to the upper surface of the base. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A microphone assembly comprising:
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a base; a microelectromechanical system (MEMS) device disposed on the base; and a solid cover attached to the base and forming an acoustic chamber for the MEMS device, wherein the solid cover is comprised of; a metal mesh layer having a predetermined shape with an interior surface and an exterior surface; and a layer of epoxy material covering the exterior surface of the metal mesh layer, wherein the epoxy material is patterned to form an acoustic port that exposes a portion of the underlying metal mesh layer, wherein the exposed portion of the metal mesh layer allows sound to pass there through but not allowing particulates to pass there through. - View Dependent Claims (25, 26, 27, 28, 29)
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30. A microphone assembly comprising:
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a base; a microelectromechanical system (MEMS) device disposed on the base; and a solid cover attached to the base and forming an acoustic chamber for the MEMS device, wherein the solid cover is comprised of; a layer of epoxy material formed into a predetermined shape having an interior surface and an exterior surface, and having an acoustic port in an upper portion of the predetermined shape; and a layer of metal mesh disposed on the interior surface of the epoxy material layer, wherein the metal mesh layer completely covers the acoustic port and allows sound to pass through the acoustic port but not allowing particulates to pass through. - View Dependent Claims (31, 32, 33, 34, 35)
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36. A microphone assembly comprising:
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a base; a microelectromechanical system (MEMS) device disposed on the base; and a solid cover attached to the base and forming an acoustic chamber for the MEMS device, wherein the solid cover is comprised of; sidewall portions comprised of a fused material without voids; and an acoustic portion comprised of a partially fused material containing voids, wherein the sidewall portions and the acoustic portion cooperate to provide the acoustic chamber, wherein the acoustic portion allows sound to pass there through but not allowing particulates to pass there through. - View Dependent Claims (37, 38, 39, 40, 41)
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Specification