Composite tip array for polymer pen lithography

• US 9,079,338 B2
• Filed: 05/09/2012
• Issued: 07/14/2015
• Est. Priority Date: 05/09/2012
• Status: Active Grant

• Current Assignee: Hong Kong Polytechnic University
• Original Assignee: Hong Kong Polytechnic University
• Inventors: Zheng, Zijian, Shen, Youde, Zhou, Xuechang, Zhuang, Xie
• Primary Examiner(s): HINDENLANG, ALISON L
• Application Number:
  US13/467,552
• Publication Number:
  US 20130302464A1
• Time in Patent Office: 1,161 Days
• US Class Current: 1/1
• CPC Class Codes: B29C 39/148 characterised by the shape of the surface
• CPC Class Codes: B29C 39/203 Making multilayered articles
• CPC Class Codes: B29L 2031/756 Microarticles, nanoarticles
• CPC Class Codes: B29L 2031/7562 Nanoarticles
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

A method of preparing a tip for lithography, includes forming a mold having at least one recess; disposing a first polymer in the recess to form an apex of the tip,; curing the first polymer in the recess; and disposing a second polymer in the recess to form a base of the tip. The Young'"'"'s Modulus of the second polymer is lower than the Young'"'"'s Modulus of the first polymer. The tip structure for lithography includes a substrate, and a layered structure including a tip having an apex of a first polymer and a base of a second polymer. The first polymer is less resiliently deformable than the second polymer.

Claims

1. A tip structure for use in lithography comprising:

a substrate; and

a layered structure on the substrate, wherein

the layered structure includes a tip having an apex comprising a first polymer, and a base comprising a second polymer, and

the first polymer is less resiliently deformable than the second polymer, so that size of a feature produced by pressing the tip of the tip structure against a deformable film depends upon force applied in pressing the tip against the deformable film.

2. The tip structure of claim 1, including a layer of a third polymer between the substrate and the second polymer.

3. The tip structure of claim 2, wherein the third polymer and the first polymer are the same polymer.

4. The tip structure of claim 2, including a primer between the substrate and the third polymer.

5. The tip structure of claim 2, wherein the third polymer has a thickness in a range from 0.1 μ

m to 20 μ

m.

6. The tip structure of claim 1, wherein the first polymer has a higher Young'"'"'s modulus than the second polymer.

7. The tip structure of claim 6, wherein the Young'"'"'s modulus of the first polymer and the Young'"'"'s modulus of the second polymer are in a ratio of at least 10.

8. The tip structure of claim 6, wherein the Young'"'"'s modulus of the first polymer is in a range of 1 GPa to 4 GPa.

9. The tip structure of claim 6, wherein the Young'"'"'s modulus of the second polymer is in a range from 0.3 MPa to 10 MPa.

10. The tip structure of claim 1, wherein the apex has a thickness in a range from 1 μ

m to 20 μ

m.

11. The tip structure of claim 1, wherein the base has a thickness in a range from 10 μ

m to 50 μ

m.

12. The tip structure of claim 1, wherein the tip has a pyramidal shape.

13. The tip structure of claim 1, wherein the tip is transparent.

14. An array of tips comprising a plurality of tips wherein

each of the tips includes an apex comprising a first polymer and a base comprising a second polymer, and

the first polymer is less resiliently deformable than the second polymer, so that size of a feature produced by pressing the tip against a deformable film depends upon force applied in pressing the tip against the deformable film.