Fluid storage and dispensing systems and processes

• US 9,079,758 B2
• Filed: 05/31/2011
• Issued: 07/14/2015
• Est. Priority Date: 06/06/2005
• Status: Active Grant

• Current Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: O'Dougherty, Kevin T., Tom, Glenn M.
• Primary Examiner(s): JACYNA, J CASIMER
• Application Number:
  US13/149,844
• Publication Number:
  US 20110226806A1
• Time in Patent Office: 1,505 Days
• Field of Search: 222/1, 222/94, 222/95, 222/105, 222/386.5, 222/394, 222/400.7, 222/65
• US Class Current: 1/1
• CPC Class Codes: B67D 7/0261 specially adapted for transferring liquids of high purity
• CPC Class Codes: B67D 7/0288 Container connection means for dispensing beverages on draught B67D1/0829
• CPC Class Codes: B67D 7/32 Arrangements of safety or warning devices; Means for preventing unauthorised delivery of liquid
• CPC Class Codes: B67D 7/3227 relating to venting of a container during loading or unloading
• CPC Class Codes: B67D 7/3281 Details
• CPC Class Codes: B67D 7/34 Means for preventing unauthorised delivery of liquid
• CPC Class Codes: B67D 7/344 by checking a correct coupling or coded information
• CPC Class Codes: F16K 35/00 Means to prevent accidental or unauthorised actuation
• CPC Class Codes: F16K 35/025 said actuating element being operated manually (e.g. a push-button located in the valve actuator)
• CPC Class Codes: F16L 37/08 in which the connection between abutting or axially overlapping ends is maintained by locking members F16L37/22 - F16L37/26 take precedence
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 29/53 Means to assemble or disassemble

Abstract

Fluid storage and dispensing systems and processes involving various structures methods for fluid storage and dispensing, including, pre-connect verification couplings that are usefully employed with fluid storage and dispensing packages to ensure proper coupling and avoid fluid contamination issues, empty detect systems (e.g., monitoring pressure of dispensed liquid medium to detect pressure droop conditions) useable with fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.

Claims

1. A fluid supply system comprising:

a liner-based fluid storage and dispensing package including a liner adapted to contain a liquid medium in a zero or near-zero headspace condition;

a pressurized gas source adapted to exteriorly exert on the liner a gas pressure for pressure-mediated dispensing of said liquid medium from the liner; and

a monitor adapted to monitor pressure of the liquid medium dispensed from the liner in a zero or near-zero headspace condition and adapted to generate a monitor output signal indicative of a pressure droop condition of the dispensed liquid medium to indicate onset of exhaustion of liquid medium from the liner;

wherein the monitor includes a pressure transducer arranged to monitor pressure of the liquid medium dispensed from the liner, and a processor operatively coupled to the transducer to receive transducer output signals for signal processing of same and to determine, before the liner is exhausted of liquid medium, that said pressure droop condition exists.

2. A fluid supply system according to claim 1, wherein the liner contains a liquid medium selected from the group consisting of photoresist liquid compositions and chemical mechanical polishing slurries.

3. A fluid supply system according to claim 1, further comprising a dispensing pump in flow circuitry coupled between said liner and a location of use of said liquid medium dispensed from the liner.

4. A fluid supply system according to claim 1, operatively coupled in fluid medium-transmitting relationship to a semiconductor manufacturing tool selected from the group consisting of coating tools, etching tools, publishing tools, masking tools, deposition tools, volatilization tools, pyrolysis tools, packaging tools, mixing tools, and abatement tools.

5. A fluid supply system according to claim 1, wherein the processor is arranged to control fluid dispensing and utilization of liquid medium dispensed from the liner.

6. A fluid supply system according to claim 1, wherein the processor is further adapted to control the pressurized gas source, to modulate flow thereof.

7. A fluid supply system according to claim 1, wherein the liner is operatively coupled to external flow circuitry, and the processor is further adapted to control at least one of:

pressurizing gas flow rate from the pressurized gas source;

fluid processing at a location of use of liquid medium dispensed from the liner;

at least one valve in the flow circuitry; and

at least one pump in the flow circuitry.

8. A fluid supply system according to claim 1, wherein the processor is adapted to monitor said gas pressure.

9. A semiconductor manufacturing tool comprising a fluid supply system according to claim 1.

20. A fluid supply system according to claim 1, further comprising a filter arranged for filtering of liquid dispensed from the liner, wherein the pressure transducer is downstream of the liner and upstream of said filter.

23. A fluid supply system according to claim 1, wherein the processor determines that said pressure droop condition exists only after dispensed liquid medium pressure begins to decrease, at a lower rate of dispensed liquid medium pressure change vs. time, and only before dispensed liquid medium pressure continues to decrease, at a higher rate of dispensed liquid medium pressure change vs. time relative to the lower rate, to provide an early indication that the liner is approaching exhaustion of liquid medium.

24. A fluid supply system according to claim 1, further comprising a control system coupled with the processor to output an alarm indicative of said pressure droop, before liquid medium is exhausted from the liner, to initiate a liner change-out operation for continuation of dispensing from a replacement liner.

10. A method of supplying fluid to a location of use from a liner-based fluid storage and dispensing package including a liner holding said fluid, the method comprising:

applying exterior pressure to the liner to progressively collapse the liner and dispense fluid therefrom,

monitoring pressure of the dispensed fluid during dispensing operation to generate an output signal indicative of a pressure droop condition of the dispensed fluid to indicate onset of exhaustion of fluid from the liner; and

using a processor to process sensor output signals indicative of pressure of dispensed fluid and to determine, before the liner is exhausted of fluid, that said pressure droop condition exists.

11. A method according to claim 10, further comprising switching-in another liner-based fluid storage and dispensing package to effect continuity of dispensing to the location of use.

12. A method according to claim 10, wherein fluid dispensed from the liner is subjected to pumping in a dispensed fluid flow circuit, and delivered from the flow circuitry to a location of use.

13. A method according to claim 10, wherein when said predetermined approach to exhaustion is reached, a change-out operation is initiated for continuation of dispensing from another liner.

14. A method according to claim 10, wherein when said predetermined approach to exhaustion is reached, the dispensing operation is modified to terminate dispensing operation in a manner coordinated with remaining inventory of fluid in the liner.

15. A method according to claim 10, further comprising imposing a pressure spike on the liner to effect further dispensing of fluid from the liner upon determination of said pressure droop condition indicating onset of exhaustion of fluid from the liner.

16. A method according to claim 15, wherein fluid dispensed from the liner subsequent to imposition of the pressure spike thereon is flowed to a reservoir for transitional supply of fluid during exhaustion of fluid from the liner.

17. A method of operating a semiconductor manufacturing tool, comprising:

supplying fluid to a location of use from a liner-based storage and dispensing page according to the method of claim 10, wherein the fluid comprises a semiconductor manufacturing fluid and the location of use comprises a downstream fluid-utilizing semiconductor manufacturing tool; and

utilizing the dispensed fluid in the fluid-utilizing semiconductor manufacturing tool.

18. A method according to claim 17, further comprising manufacturing a semiconductor product.

19. A method according to claim 10, wherein said applying exterior pressure to the liner comprises supplying gas from a pressurized gas source to exteriorly exert directly on all sides of the liner a gas pressure for pressure-mediated dispensing of said fluid from the liner.

21. A method according to claim 10, wherein a filter adapted for filtering of liquid dispensed from the liner is arranged between the liner and the location of use, and wherein said monitoring pressure of the dispensed fluid comprises monitoring pressure of the dispensed fluid upstream of said filter.

22. The method of claim 10, wherein a decline between the exterior pressure to the liner and a pressure of the dispensed fluid indicative of the pressure droop condition is a function of time.

25. A method according to claim 10, further comprising:

using the processor to determine that said pressure droop condition exists only after dispensed fluid pressure begins to decrease, at a lower rate of dispensed fluid pressure change vs. time, and only before dispensed fluid pressure continues to decrease, at a higher rate of dispensed fluid pressure change vs. time relative to the lower rate, to provide an early indication that the liner is approaching exhaustion of fluid.

26. A method as claimed in claim 10, wherein the applying includes applying exterior pressure to the liner to progressively collapse the liner and dispense fluid therefrom in a succession of discrete volumes as part of a pumping cycle;

the method further comprising;

using the processor to determine that said pressure droop condition exists only after a slope of pressure vs. time for the dispensed small volumes begins to fall softly and only before a slope of pressure vs. time for the dispensed small volumes begins to fall rapidly, to provide an early warning indication that the liner is approaching exhaustion of fluid.