Yaw-rate sensor
First Claim
1. A sensor comprising:
- a substrate;
a plurality of movable substructures that are mounted over a surface of the substrate and that include at least a first Coriolis element and a second Coriolis element;
a driver configured to set the movable substructures into a driven mode;
a plurality of detectors configured to detect deflections of the Coriolis elements, wherein (a) detected deflections of the first Coriolis element are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis and (b) detected deflections of the second Coriolis element are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis;
a first spring that directly connects the first Coriolis element to the second Coriolis element; and
at least one second spring via which a frame is connected to at least one of the Coriolis elements, which the frame surrounds.
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Accused Products
Abstract
A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
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Citations
22 Claims
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1. A sensor comprising:
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a substrate; a plurality of movable substructures that are mounted over a surface of the substrate and that include at least a first Coriolis element and a second Coriolis element; a driver configured to set the movable substructures into a driven mode; a plurality of detectors configured to detect deflections of the Coriolis elements, wherein (a) detected deflections of the first Coriolis element are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis and (b) detected deflections of the second Coriolis element are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis; a first spring that directly connects the first Coriolis element to the second Coriolis element; and at least one second spring via which a frame is connected to at least one of the Coriolis elements, which the frame surrounds. - View Dependent Claims (2)
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3. A sensor comprising:
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a substrate; a plurality of movable masses that are mounted over a surface of the substrate; a driver configured to set the movable masses into a driven mode; and a plurality of detectors configured to detect deflections of the movable masses, the deflections including (a) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis and (b) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis; a first spring that directly connects two of the masses to each other; and at least one second spring via which a frame is connected to at least one of the two masses, which the frame surrounds.
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4. A sensor comprising:
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a substrate; a plurality of movable substructures that are mounted over a surface of the substrate; a driver configured to set the movable substructures into a driven mode in which the substructures oscillate in a plane that extends parallel to the surface of the substrate; and a plurality of detectors configured to detect deflections of the movable substructures, the deflections including (a) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis and (b) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis; a first spring that directly connects two of the substructures to each other; and at least one second spring via which a frame is connected to at least one of the two substructures to which the frame is external. - View Dependent Claims (5, 6, 7, 8)
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9. A sensor comprising:
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a substrate; a plurality of movable substructures that are mounted over a surface of the substrate and that include a plurality of Coriolis elements, the plurality of Coriolis elements including at least a first Coriolis element, a second Coriolis element, and a third Coriolis element; a driver configured to set the movable substructures into a driven mode; and a plurality of detectors configured to detect deflections of the Coriolis elements, wherein; (a) detected deflections of the first Coriolis element are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis; (b) detected deflections of the second Coriolis element are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis; (c) detected deflections of the third Coriolis element are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a third axis that is perpendicular to each of the first and second axes; (d) the detected deflections of the first Coriolis element, which are associated by the sensor with the input motion about the first axis, are along the second axis; and (e) the first Coriolis element and at least a portion of the second Coriolis element are arranged side by side along the third axis and are coupled to the substrate by a same frame. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A sensor comprising:
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a substrate; a plurality of movable masses that are mounted over a surface of the substrate; a driver configured to set the movable masses into a driven mode; and a plurality of detectors configured to detect deflections of the movable masses, the deflections including (a) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis, (b) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis, and (c) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a third axis that is perpendicular to each of the first and second axes, wherein; (i) the detected deflections, which are associated by the sensor with the input motion about the first axis, are of a first one of the masses and are along the second axis; (ii) the detected deflections, which are associated by the sensor with the input motion about the second axis, are of a second one of the masses; (iii) the detected deflections, which are associated by the sensor with the input motion about the third axis, are of a third one of the masses; and (iv) the first mass and at least a portion of the second mass are arranged side by side along the third axis and are coupled to the substrate by a same frame. - View Dependent Claims (21, 22)
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Specification